Abstract:The dynamic characteristics of micro-optothermal (OT) expansion and novel OT microactuators are theoretically analysed using a heat transient model and finite element modelling thermal simulation. Three different-shaped microactuators are machined by an excimer laser micromachining system using a single layer material; first with a single OT expansion arm; second with a bi-direction microactuator (BDMA); and third with a bi-direction microswitch (BDMS). A red laser diode (650 nm) with a maximum power output of 30 mW and an adjustable frequency of 0-20 Hz is used as an irradiation light source. The experimental results show that the maximum response frequency of the OT microactuators can be at least 15 Hz, and the deflections of the BDMA (about 13 m at 10 mW, 2 Hz) and the BDMS (about 10 m at 8 mW, 2 Hz) are significantly magnified compared with the OT expansion (1.32 m at 10 mW, 2 Hz) of the single arm, proving the feasibility of the enlarged bi-direction deflection/vibration of the microactuators. The expansion and deflection amplitude of the microactuators decrease as the laser frequency increases, and the experimental data and curves greatly agree with the theoretical predictions. The new method of OT microactuators can be widely applied in the fields where simple structure, easy fabrication, large displacement and wireless controlling are required.

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Numerical and experimental study on bi-direction deformations in laser micro forming of two-bridge actuators

Analysis and Prediction of the In-Plane Deformation in Laser Thermal Adjustment

Processing Optimization in Multiheating Positions for Laser Thermal Adjustment of Actuators

Analysis and Experimentation of Novel Bi-Directional Photo-Thermal Micro-Actuators

The Interactive Effects on Deformation Behavior in Laser Thermal Adjustment of Two-Bridge Actuators

Study on the Mechanical Behavior of Laser Micro-Adjustment of Two-Bridge Actuators

Mechanism of Laser Micro-Adjustment

Numerical and experimental investigation of cooling time in laser micro-adjustment of two-bridge actuators

Analysis and experimentation of novel asymmetric photo-thermal micro-actuator

Theoretical Modelling and Experimental Study of Novel Photothermal Microactuators

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Three-Dimensional Numerical Study on Temperature Field of Laser Bending of Sheet Metal

The Process Planning in Laser Thermal Adjustment of Three Cut-Outs Actuators

The Effect of Infrared Laser-Induced Micro/Nano Photothermal Expansion and the Novel Method of Photothermal Actuation

On the competition between in-plane and out-of-plane deformations in laser thermal adjustment

Theoretical Modeling of Microscopic Photothermal Expansion and Experimental Study of Photothermal Microactuators

Dynamic characteristics of micro-optothermal expansion and optothermal microactuators

Numerical Simulation of Thermal/Mechanical Coupling in Laser Transmission Microjoining of Pet and Titanium

Heating Position Planning in Laser Forming of Single Curved Shapes Based on Probability Convergence

NUMERICAL INVESTIGATION OF STRAIGHT-LINE LASER FORMING UNDER THE TEMPERATURE GRADIENT MECHANISM