Abstract:By using the capacitive measurement principle, high-performance micromechanical accelerometers provide low noise and power consumption, cost efficiency, and reliability. Capacitive sensors based on changes in the gap between the electrodes, as a rule, require closed-loop control, which increases the level of complexity of the measurement circuit and increases power consumption. Capacitive sensitive elements with a change in the electrode overlap area have a good linearity of the capacitance versus displacement and a large measurement range, but they are more difficult to manufacture. This paper presents and investigates a model of a sensitive element of a sandwich design of a capacitive micromechanical accelerometer, the functioning of which is based on the use of a change in the relative dielectric constant of the dielectric of capacitors due to the introduction of a movable inertial mass between the electrodes of the capacitors, moving under the action of acceleration. As a result, there is a change in capacitance in the output measuring circuit. It is shown that the considered model is sensitive to acceleration and resistant to temperature changes, with low residual mechanical stress in the sensitive element. The modeling and calculations are performed using the Ansys and SolidWorks software. It is found that the movement of the moving mass along the axis of sensitivity X is more than five times the movement of the moving mass along the nonworking axes, and the change in the capacitance between the electrodes along the axis X is almost 2500 times more than the changes in capacitance between electrodes along the nonworking axes Z and Y . Calculations have shown that for all values of the acting acceleration (up to 30 g), the mechanical stress in the sensitive element is much less than the ultimate strength of silicon, equal to 440 MPa. It is found that variation of the temperature from –40 to 85°C leads to minor changes in capacitance along the working axis (0.0025–0.003 pF). This indicates the temperature stability of the investigated micromechanical accelerometer sensing element. The results of the analysis show that the developed and investigated model of the sensitive element of the sandwich design ensures the sensitivity of the micromechanical accelerometer and the stability of its parameters.

Research on the Parametric Varying Mechanism and Modeling of Accelerometer in Storage Condition

Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers.

The Analysis of Temperature Effect and Temperature Compensation of Moems Accelerometer Based on A Grating Interferometric Cavity

Characterization and Compensation of Thermal Bias Drift of a Stiffness-Tunable MEMS Accelerometer

Thermal Stress Analysis of MEMS Accelerometer Based on Finite Element Method

Temperature Compensation Method for MEMS Accelerometer Based on Resonant Frequency

Thermal stress of MOEMS Accelerometers Based on Grating Interferometric cavity

Design of Force-Balance Capacitive Accelerometer

Temperature Bias Drift Phase-Based Compensation for a MEMS Accelerometer with Stiffness-Tuning Double-Sided Parallel Plate Capacitors

Drift of MEMS Capacitive Accelerometers for One-Year Room-Temperature Storage: A Simulation and Experimental Study

Analytical Study of Temperature Coefficients of Bulk MEMS Capacitive Accelerometers Operating in Closed-Loop Mode

Thermal Modeling and Compensation of MEMS Accelerometer

Analysis and Optimization on Dynamic Characteristics and Important Parameters of Force Feedback Accelerometer

Drift of MEMS Closed-Loop Accelerometers Induced by Dielectric Charging

Measuring Principle and Dynamic Characteristics Design for An Electro-Statically Suspended Accelerometer with Differential-Capacitance

Simulation-Based Design and Optimization of Accelerometers Subject to High-Temperature and High-Impact Loads

Modeling the Sensitive Element of the Sandwich Construction of a Capacitive Micromechanical Accelerometer, Taking into Account the Change in the Dielectric Constant

Research on structure design of quartz-flex accelerometer

Study of self-calibrating MEMS accelerometers

Systematic Error Analysis and Modeling of MEMS Close-Loop Capacitive Accelerometer.

Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer