Charge States of Sputtered Atoms/ions

LM Pan,YS Wang,FY Huang,JY Tang,FJ Yang
DOI: https://doi.org/10.1088/1004-423x/4/12/003
1995-01-01
Abstract:The charge states of sputtered cesium and oxygen ions/atoms from metal surfaces have been discussed with the time-dependent Newns-Anderson model. The final charge state distribution has been calculated as a function of work function of the surfaces. The calculated results fit the experimental data well. Besides, the dependence of the final charge states of the sputtered oxygen particles on the surface temperature is also predicted.
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