Design of an Integrated Device of Delay Line Array and Thermal Optical Switch Based on Polymeric Materials

李然,王雷,陈曦,陈长鸣,衣云骥,段宁,徐帅,刘楠,孙雨

DOI: https://doi.org/10.3788/gzxb20144304.0423002

2014-01-01

Abstract:An integrated device was designed which was composed of thermo-optic switch and delay line array.Rsoft software was used to optimize the parameters of digital multi-mode interference thermo-optic switch,and the varied output signal intensity can be achieved with changing the temperature of an electrode.Then a delay line with a helical structure was designed.Spiral waveguide structure was simulated by BPM software.Considering the size of the device and the loss parameter,a reasonable bend radius of the spiral structure was designed.The integrated delay line array structure with the thermooptic switch has a maximum delay time of 399.4ps and the corresponding delay interval is 9.2ps.The device has three layers,which are fabricated by using SiO2as lower cladding layer,SU-8photoresist as core layer and polymethylmethacrylate as upper cladding layer.By spin coating,lithography and wet etching,an integrated device with 1×4 MMI thermo-optic switch and delay line array was fabricated, and near-infrared field patterns of the delay line array was tested with insertion loss of 15~19dB.