Investigation of the Effect of Annealing Temperature on Optical Properties of Lanthanum-Oxide Thin Films Prepared by Sol-Gel Method
Gang Gao,Lei Yang,Bing Dai,Fei Xia,Zhenhuai Yang,Shuai Guo,Peng Wang,Fangjuan Geng,Jiecai Han,Jiaqi Zhu
DOI: https://doi.org/10.1016/j.surfcoat.2018.07.001
2019-01-01
Abstract:As lanthanum oxide (La2O3) has a large bandgap, it exhibits excellent optical properties. In this work, La2O3 thin films are prepared by the sol-gel method from a lanthanum chloride (LaCl3) precursor, on quartz and sapphire (0001) substrates. The effect of the annealing temperature (400-800 degrees C) on the optical properties of the La2O3 films is investigated. The structure and optical properties are analyzed by X-ray diffraction, atomic force microscopy, scanning electronic microscopy, X-ray photoemission spectroscopy, Raman spectroscopy, ultraviolet (UV)-visible spectroscopy, Fourier transform infrared spectroscopy, and infrared variable angle spectroscopic ellipsometry. Results indicate that with an annealing temperature of similar to 600 degrees C, the roughness and optical properties of La2O3 films can be significantly improved.