Microstructure and Electrical Properties of La0.7Sr0.3MnO3 Thin Films Deposited by Metallo-Organic Decomposition Method

Zhan Jie Wang,Hirokazu Usuki,Toshihide Kumagai,Hiroyuki Kokawa
DOI: https://doi.org/10.1016/j.jcrysgro.2006.05.014
IF: 1.8
2006-01-01
Journal of Crystal Growth
Abstract:Lanthanum strontium manganate (La0.7Sr0.3MnO3: LSMO) thin films were grown on SiO2/Si substrates by a metallo-organic decomposition method, and their crystalline structure, microstructure and electrical properties were investigated. X-ray diffraction analysis indicated that La0.7Sr0.3MnO3 films with a perovskite single phase could be obtained by annealing at 700°C. Transmission electron microscopy (TEM) images showed that the films consisted of packed grains with a mean grain size of approximately 25nm. The resistivity of the La0.7Sr0.3MnO3 films decreased rapidly as the annealing temperature increased from 550 to 700°C, and did not change greatly with increasing annealing temperature from 700°C. The La0.7Sr0.3MnO3 films annealed at 700°C had a lower resistivity of 5.70×10−4Ωm.
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