Broadband and Omnidirectional Antireflection of SiN Composite Nanostructures–decorated Si Surface for Highly Efficient Si Solar Cells

Zhen Zhang,Yanyan Wang,Jian Zhu,Xuemei Wu,Ruiying Zhang

DOI: https://doi.org/10.1117/1.jnp.9.093075

IF: 1.179

2015-01-01

Journal of Nanophotonics

Abstract:SiN composite nanostructures (CNs), composed of SiN nanorods and the underlying SiN film, are formed on Si substrate through SiN deposition, nanosphere lithography, and dry etching. The antireflection performance of Si samples decorated by the SiN CNs with different morphology is experimentally investigated. All the SiN CNs decorated Si samples exhibit antireflection over 300 to 1000 nm and a wide view. Their antireflection performance varies with the height of the nanorods (H) and the thickness of the underneath film (T). A reflectivity of less than 10% over 300 to 1000 nm and an incident angle of 8 deg and 65 deg are achieved in the optimal antireflection structures with H = 240 nm, T = 750 nm and H = 500 nm, T = 300 nm, respectively. Furthermore, antireflection behavior in the SiN CNs decorated Si sample with H = 500 nm, T = 300 nm is compared with that in Si samples decorated by 565- and 60-nm thick SiN film. A weighted reflectance of about 5% is achieved in an SiN CNs decorated Si sample in any incident angle, which is much lower than that in any SiN film coated Si sample. Moreover, such a performance is beyond the limitation of interface reflectivity of Si and SiN materials, and should benefit Si solar cells to simultaneously enhance the absorption and surface passivation. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)