Abstract:Results are presented for modelling of the evaporation and magnetron sputter deposition of Zn(x)O(y) onto an O-terminated ZnO (0001¯) wurtzite surface. Growth was simulated through a combination of molecular dynamics (MD) and an on-the-fly kinetic Monte Carlo (otf-KMC) method, which finds diffusion pathways and barriers without prior knowledge of transitions. We examine the effects of varying experimental parameters, such as substrate bias, distribution of the deposition species and annealing temperature. It was found when comparing evaporation and sputtering growth that the latter process results in a denser and more crystalline structure, due to the higher deposition energy of the arriving species. The evaporation growth also exhibits more stacking faults than the sputtered growth. Post-annealing at 770 K did not allow complete recrystallization, resulting in films which still had stacking faults where monolayers formed in the zinc blende phase, whereas annealing at 920 K enabled the complete recrystallization of some films to the wurtzite structure. At the latter temperature atoms could also sometimes be locked in the zinc blende phase after annealing. When full recrystallization did not take place, both wurtzite and zinc blende phases were seen in the same layer, resulting in a phase boundary. Investigation of the various distributions of deposition species showed that, during evaporation, the best quality film resulted from a stoichiometric distribution where only ZnO clusters were deposited. During sputtering, however, the best quality film resulted from a slightly O rich distribution. Two stoichiometric distributions, one involving mainly ZnO clusters and the other involving mainly single species, showed that the distribution of deposition species makes a huge impact on the grown film. The deposition of predominantly single species causes many more O atoms at the surface to be sputtered or reflected, resulting in an O deficiency of up to 18% in the deposited film and therefore resulting in more stacking faults and phase boundaries. The methods used allow analysis of key mechanisms that occur during the growth process and give hints as to the optimum conditions under which complete crystalline layers can form.

Hydrothermal Growth of ZnO Microstructures on Ar Plasma Treated Graphite

Influence of O_2/Ar Flow Ratio on Microstructures and Photoluminescence of ZnO Films

Enhanced emission and surface modification in ZnO treated with Ar, H, and O plasmas

Enhanced field emission of ZnO nanorod arrays by Ar plasma treatment

Hydrothermally Grown ZnO Nanostructures on Few-Layer Graphene Sheets.

Surface treatment of metals using an atmospheric pressure plasma jet and their surface characteristics

Field Electron Emission Improvement of ZnO Nanorod Arrays after Ar Plasma Treatment

Low-temperature Growth of ZnO Nanostructures by Oxygen Plasma Oxidation of ZnCl2

Effect of surface treated amorphous Si–Zn–Sn–O on the electrical properties of thin film transistors by Ar plasma treatment

Surface Modification and Optical Properties of ZnO Nanowires

Effect of substrate surface treatment on the hydrothermal synthesis of zinc oxide nanostructures

Plasma Surface Modification of 3Y-TZP at Low and Atmospheric Pressures with Different Treatment Times

Modelling the growth of ZnO thin films by PVD methods and the effects of post-annealing

Enhancement of Electrical Characteristics of SnGaO Thin-Film Transistors Via Argon and Oxygen Plasma Treatment

Controlling the hydrothermal growth and the properties of ZnO nanorod arrays by pre-treating the seed layer

Effects of Oxygen Plasma Treatment on the Surface Properties of Ga-doped ZnO Thin Films

Oxidants in ZnO Thin Film Growth by LP-MOCVD

Tunable Hydrogen-Related Defects in ZnO Nanowires Using Oxygen Plasma Treatment by Ion Energy Adjustment

A comparison between ion irradiation assisted- and electron irradiation assisted-oxygen plasma treatment on modification of nanostructured carbon films

Growth Mechanism of ZnO Nanostructures in Wet-Oxidation Process

Plasma-deposited reactive species assisted synthesis of colloidal zinc-oxide nanostructures