Defects at Ge:Geo2 and Ge:Meox Interfaces

H. Li,J. Robertson
DOI: https://doi.org/10.1016/j.mee.2013.03.111
IF: 2.3
2013-01-01
Microelectronic Engineering
Abstract:We studied the atomic structure and electronic property of oxygen vacancy at Ge:GeO2 and various Ge:MeOx interfaces. Oxygen vacancy at Ge:GeO2 interface can re-arrange to form valence alternation pair (VAP). Two VAP configurations are studied, we found that they differ in induced gap state and band offset shift. Oxygen vacancy at various abrupt Ge:MeOx interfaces is found to induce no gap state even if Me-Ge bond forms. (C) 2013 Elsevier B.V. All rights reserved.
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