Dislocations in SrTiO 3 thin films grown on LaAlO 3 substrates

Y. L. Qin,C. L. Jia,K. Urban,J. H. Hao,X. X. Xi
DOI: https://doi.org/10.1557/JMR.2002.0451
IF: 2.7
2002-01-01
Journal of Materials Research
Abstract:The dislocation configurations in SrTiO 3 thin films grown epitaxially on LaAlO 3 (100) substrates were studied by conventional and high-resolution transmission electron microscopy. Misfit dislocations had, in most cases, a Burgers vector a 〈100〉 and line directions of 〈100〉 These dislocations constitute orthogonal arrays of parallel dislocations at the interface, relieving the lattice mismatch between SrTiO 3 and LaAlO 3 . Threading dislocations were found to be the major defects in the films. Two types of threading dislocations with the Burgers vectors a 〈100〉?and a 〈100〉?were identified. The relations of these threading dislocations with the misfit dislocations were investigated and are discussed in this paper.
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