Studying on Source/Drain Contact Resistance Reduction for Inp-Based Hemt

Zhiqiang Li,Ning An,Jianping Zeng,Xiaodong Tong,Wenjie Wang,Qian Li,Haitao Liu,Yi Liang,Hailin Tang,Yong-Zhong Xiong
DOI: https://doi.org/10.1002/mop.29531
IF: 1.311
2016-01-01
Microwave and Optical Technology Letters
Abstract:In this letter, Ti/Pt/Au metal system has been investigated for the source/drain contact of MHEMT, the Ti/Pt/Au contact exhibits good ohmic contact characteristics with well thermal stability in the temperature range from 280 to 340 degrees C. To further optimize the contact resistance, different metal deposition methods and contact layers are experimentally investigated. With sputtering Pd as an interlayer between Ti/Pt/Au and n(+)-InGaAs, the specific contact resistivity is further reduced to 3.51 x 10(-5) cm(2). Meanwhile, by adopting this metal contact system, the MHEMT shows good DC and RF characteristics, including full channel current of 75 mA/mm, extrinsic maximum transconductance g(m.max) of 96 ms/mm, unity current gain cutoff frequency f(T) of 60 GHz and maximum frequency of oscillation f(max) of 156 GHz. These good electrical characteristics demonstrate that this metal contact system is beneficial for the performance improvement of MHEMT. (c) 2016 Wiley Periodicals, Inc. Microwave Opt Technol Lett 58:217-221, 2016
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