Abstract:TiO2 films were deposited from oxygen/titanium tetraisopropoxide (TTIP) plasmas at low temperature by Helicon-PECVD at floating potential ([Formula: see text] or substrate self-bias of [Formula: see text]50[Formula: see text]V. The influence of titanium precursor partial pressure on the morphology, nanostructure and optical properties was investigated. Low titanium partial pressure ([TTIP] [Formula: see text] 0.013[Formula: see text]Pa) was applied by controlling the TTIP flow rate which is introduced by its own vapor pressure, whereas higher titanium partial pressure was formed through increasing the flow rate by using a carrier gas (CG). Then the precursor partial pressures [TTIP[Formula: see text]CG] [Formula: see text][Formula: see text]Pa and 0.093[Formula: see text]Pa were obtained. At [Formula: see text], all the films exhibit a columnar structure, but the degree of inhomogeneity is decreased with the precursor partial pressure. Phase transformation from anatase ([TTIP] [Formula: see text] 0.013[Formula: see text]Pa) to amorphous ([TTIP[Formula: see text]CG] [Formula: see text][Formula: see text]Pa) has been evidenced since the O[Formula: see text] ion to neutral flux ratio in the plasma was decreased and more carbon contained in the film. However, in the case of [Formula: see text]50[Formula: see text]V, the related growth rate for different precursor partial pressures is slightly ([Formula: see text] 15%) decreased. The columnar morphology at [TTIP] [Formula: see text] 0.013[Formula: see text]Pa has been changed into a granular structure, but still homogeneous columns are observed for [TTIP[Formula: see text]CG] [Formula: see text][Formula: see text]Pa and 0.093[Formula: see text]Pa. Rutile phase has been generated at [TTIP] [Formula: see text][Formula: see text]Pa. Ellipsometry measurements were performed on the films deposited at [Formula: see text]50[Formula: see text]V; results show that the precursor addition from low to high levels leads to a decrease in refractive index.

Effect of UV-Irradiation on Processing of Lead Titanate Thin Film Derived from Photoreactive [Pb-Ti] Precursor Modified with Alkanolamine.

Preparation and characterization of heat-assisted PbS/TiO 2 thin films

Photoreaction of titanium-based metal-organic compounds for ceramic fine patterning

Hydrothermal Synthesis and Photoluminescence of Pre-Perovskite Lead Titanate Nanofibers

Photochemical-induced self-seeding effect on lead zirconate titanate thin film

Hydrothermal synthesis and characterization of lead titanate perovskite tetragonal microplates

Photocatalytic activity of PbTiO<sub>3</sub> nanocrystals synthesized by hydrothermal method

Electrophoretic Deposition and Photoluminescent Properties of Eu-doped BaTiO3thin Film from a Suspension of Monodispersed Nanocrystallites

Preparation of Thicker Pbtio3 Thin Film by A Metallo- Organic Solution Deposition Process

Hydrothermal Synthesis and Phase-, Morphology-Evolution Mechanism of Lead Titanate Nanostructures Assisted with Tetramethylammonium Hydroxide

Azobenzene-Containing Block Copolymer Templates for Robust Au@TiO2 Nanoporous Network Films Toward Hot-Electron-Mediated Efficient Visible-Light Photocatalysis

Preparation of PbTiO3 thin films by a modified Sol-Gel processing

Sonochemical Preparation of PbTiO3 Fine Powders

The Effect of Plasma Gas Composition on the Nanostructures and Optical Properties of TiO2 Films Prepared by Helicon-PECVD

Pbtio3 Thin-Films Prepared By Metalorganic Chemical-Vapor-Deposition On Laalo3

Effects of annealing technique and TiO2 seed layer on the phase composition of 0.7Pb(Mg1/3Nb2/3)O3–0.3PbTiO3 film

Preparation Of Epitaxial Pbtio3 Thin-Films By Metalorganic Vapor-Phase Epitaxy Under Reduced Pressure

Application of Hydrothermal Mechanism for Tailor-Making Perovskite Titanate Films

Preparation of the polymerizable titania oriented to 3D printing and the laser-induced crystallization

UV Processing of Oriented KTa0.50Nb0.50O3 Thin Films.

Mild Hydrothermal Synthesis of Titanate Films: from Polycrystalline Batio3 to Epitaxial Pbtio3