Abstract:Novel optically-rough and physically-flat transparent conductive oxides (TCO) substrates were developed by spin-coating Al doped Zn1−xMgxO (AZMO) transparent conductive thin film on roughened glass substrates treated by a reactive-ion etching (RIE) process, for enhancing the light-absorption in superstrate-type solar cells without deteriorating growth of photoactive layers. These substrates possess features of high transmittance, low surface roughness and strong light-scattering behavior. A surface morphology of randomly distributed irregular cones was formed on the Corning 7059 glass substrate through the overlapping of several lens-shaped cavities etched by the carbon tetrafluoride-oxygen plasma during the RIE process. This rough interface morphology not only has light-scattering ability, but also shows an antireflection effect at the interface between the AZMO and RIE etched glass substrate. One prototype with 40 cycles AZMO coating on a RIE etched substrate showed a root-mean-square surface roughness of 4.6nm, a sheet resistance of 75.1Ω/sq, and a haze ratio in transmission of 12.2% at the wavelength of 700nm. These TCO substrates were applied to the front electrode of superstrate-type hydrogenated amorphous Si single junction solar cells. The solar cells exhibited a current gain of 11% and an efficiency gain of 14% as well as similar open-circuit voltage and fill factor with respect to the ones deposited on the AZMO coated flat glass substrate. These substrates would enable an efficient light management and the growth of high quality photoactive materials simultaneously for superstrate-type thin-film solar cells.

High-Haze and Wide-Spectrum Hydrogenated Mgzo Tco Films on Micro-Textured Glass Substrates for Thin-Film Solar Cells

High Haze Textured Surface B-doped ZnO-TCO Films on Wet-Chemically Etched Glass Substrates for Thin Film Solar Cells

Transparent Conductive Mg and Ga Co-Doped ZnO Thin Films for Solar Cells Grown by Magnetron Sputtering: H2 Induced Changes

Innovative Wide-Spectrum Mg and Ga-Codoped ZnO Transparent Conductive Films Grown Via Reactive Plasma Deposition for Si Heterojunction Solar Cells

Development of textured ZnO-coated low-cost glass substrate with very high haze ratio for silicon-based thin film solar cells

Method for Fabricating Textured High-Haze ZnO:Al Transparent Conduction Oxide Films on Chemically Etched Glass Substrates

Modified Textured Surface Mocvd-Zno:B Transparent Conductive Layers for Thin-Film Solar Cells

Development of Natively Textured Hydrogenated Ga-doped ZnO-TCO Thin Films for Solar Cells Via Magnetron Reactive Sputtering

Deposition and Characterization of AZO Thin Films on Flexible Glass Substrates Using DC Magnetron Sputtering Technique

Natively textured surface hydrogenated gallium-doped zinc oxide transparent conductive thin films with buffer layers for solar cells

Wide-spectrum Mg and Ga co-doped ZnO–TCO thin films with introduced hydrogen grown by magnetron sputtering at room temperature

Optically-rough and Physically-Flat TCO Substrates for Superstrate-Type Thin-Film Solar Cells: Sol-Gel Zn1−xMgxO Coating on Nanoimprint Patterned Glass Substrates

Light Scattering by Textured Al-Doped Zinc Oxide Film for Thin Film Silicon Solar Cells Coated on Glass Substrates

Influence of H2 Introduction on Wide-Spectrum Mg and Ga Co-Doped ZnO Transparent Conductive Thin Films

The properties of surface textured ZnO:Al films grown in hydrogen atmosphere

Natively Textured Surface Al-doped ZnO-TCO Layers with Gradual Oxygen Growth for Thin Film Solar Cells Via Magnetron Sputtering

Wide-spectrum Mg and Ga co-doped ZnO TCO thin films for solar cells grown via magnetron sputtering with H 2 introduction

Textured transparent conductive B/Al doped ZnO films utilizing reactive magnetron sputtering

Natively Textured Surface Aluminum-Doped Zinc Oxide Transparent Conductive Layers for Thin Film Solar Cells Via Pulsed Direct-Current Reactive Magnetron Sputtering

Characterization of Surface Morphology and Light Scattering of Transparent Conducting ZnO:Al Films as Front Electrode for Silicon Thin Film Solar Cells

High Haze and Low Resistive MgO/AZO Bi-layer Transparent Conducting Oxide for Thin Film Solar Cells