Abstract:Hexagonal boron nitride (hBN)-long-known as a thermally stable ceramic-is now available as atomically smooth, single-crystalline flakes, revolutionizing its use in optoelectronics. For nanophotonics, these flakes offer strong nonlinearities, hyperbolic dispersion, and single-photon emission, providing unique properties for optical and quantum-optical applications. For nanoelectronics, their pristine surfaces, chemical stability, and wide bandgap have made them the key substrate, encapsulant, and gate dielectric for two-dimensional electronic devices. However, while exploring these advantages, researchers have been restricted to flat flakes or those patterned with basic slits and holes, severely limiting advanced architectures. If freely varying flake profiles were possible, the hBN structure would present a powerful design parameter to further manipulate the flow of photons, electrons, and excitons in next-generation devices. Here, we demonstrate freeform nanostructuring of hBN by combining thermal scanning-probe lithography and reactive-ion etching to shape flakes with surprising fidelity. We leverage sub-nanometer height control and high spatial resolution to produce previously unattainable flake structures for a broad range of optoelectronic applications. For photonics, we fabricate microelements and show the straightforward transfer and integration of such elements by placing a spherical hBN microlens between two planar mirrors to obtain a stable, high-quality optical microcavity. We then decrease the patterning length scale to introduce Fourier surfaces for electrons, creating sophisticated, high-resolution landscapes in hBN, offering new possibilities for strain and band-structure engineering. These capabilities can advance the discovery and exploitation of emerging phenomena in hyperbolic metamaterials, polaritonics, twistronics, quantum materials, and 2D optoelectronic devices.

Hierarchical Structures: Large Scale Graphene/Hexagonal Boron Nitride Heterostructure for Tunable Plasmonics (Adv. Funct. Mater. 6/2014)

Large Scale Graphene/Hexagonal Boron Nitride Heterostructure for Tunable Plasmonics

Large scale growth and characterization of atomic hexagonal boron nitride layers.

Atomic Layers of Hybridized Boron Nitride and Graphene Domains

Synthesis of in-plane and stacked graphene/hexagonal boron nitride heterostructures by combining with ion beam sputtering deposition and chemical vapor deposition

Direct growth of large-area graphene and boron nitride heterostructures by a co-segregation method

Plasmon–phonon Coupling in Graphene–hyperbolic Bilayer Heterostructures

Scalable Synthesis of Monolayer Hexagonal Boron Nitride on Graphene with Giant Bandgap Renormalization

In situ epitaxial engineering of graphene and h-BN lateral heterostructure with a tunable morphology comprising h-BN domains

Facile Synthesis and Characterization of Hexagonal Boron Nitride Nanoplates by Two‐Step Route

Tunable Plasmon-Phonon Polaritons In Layered Graphene-Hexagonal Boron Nitride Heterostructures

One-Pot Confined Epitaxial Growth of 2D Heterostructure Arrays

Highly confined low-loss plasmons in graphene-boron nitride heterostructures

Temperature-triggered Chemical Switching Growth of In-Plane and Vertically Stacked Graphene-Boron Nitride Heterostructures

Seed-Assisted Growth of Single-Crystalline Patterned Graphene Domains on Hexagonal Boron Nitride by Chemical Vapor Deposition.

Electrical homogeneity of large-area chemical vapor deposited multilayer hexagonal boron nitride sheets

Atomic-Scale Structural and Chemical Characterization of Hexagonal Boron Nitride Layers Synthesized at the Wafer-Scale with Monolayer Thickness Control

Large Photothermal Effect in Sub-40 nm h-BN Nanostructures Patterned Via High-Resolution Ion Beam

Direct Growth of Hbn/graphene Heterostructure Via Surface Deposition and Segregation for Independent Thickness Regulation.

Freeform nanostructuring of hexagonal boron nitride

Epitaxially grown semiconducting hexagonal boron nitride as a deep ultraviolet photonic material