Abstract:Focused ion beam (FIB) techniques are commonly used to machine, analyse and image materials at the micro- and nanoscale. However, FIB modifies the integrity of the sample by creating defects that cause lattice distortions. Methods have been developed to reduce FIB-induced strain, however these protocols need to be evaluated for their effectiveness. Here we use non-destructive Bragg coherent X-ray diffraction imaging to study the in situ annealing of FIB-milled gold microcrystals. We simultaneously measure two non-collinear reflections for two different crystals during a single annealing cycle, demonstrating the ability to reliably track the location of multiple Bragg peaks during thermal annealing. The thermal lattice expansion of each crystal is used to calculate the local temperature. This is compared to thermocouple readings, which are shown to be substantially affected by thermal resistance. To evaluate the annealing process, we analyse each reflection by considering facet area evolution, cross-correlation maps of displacement field and binarised morphology, and average strain plots. The crystal's strain and morphology evolve with increasing temperature, which is likely to be caused by the diffusion of gallium in gold below ~280°C and the self-diffusion of gold above ~280°C. The majority of FIB-induced strains are removed by 380-410\degree C, depending on which reflection is being considered. Our observations highlight the importance of measuring multiple reflections to unambiguously interpret material behaviour.

Residual Stress Evolution During Long-Term and Cyclic Aging and Annealing of Gold Films Deposited by Electron Beam Evaporation

Effect of Post Deposition Annealing on Residual Stress Stability of Gold Films

Effect of Deposition Temperature on Long-Term Residual Stress Evolution of Au Films

Effect of Pulsed Laser Irradiation on Microstructure and Evolution of Residual Stress for Gold Film

Influence of Post-Annealing Treatment on the Morphology of Au Films Deposited on Liquid Surfaces

Annealing Temperature Dependence of Mechanical and Structural Properties of Chromium-Gold Films on the Silica Glass Substrate

Fatigue behaviors and atomic-scale mechanisms in nanocrystalline gold thin film

Initiation and stagnation of room temperature grain coarsening in cyclically strained gold films

Elastic–plastic Analyses on the Residual Stresses and Curvature of the Film/substrate Bilayer System

Residual stress and crystal orientation in magnetron sputtering Au films

Study on residual stress of multi-layered Au/NiCr/Ta films in microwave integrated circuits (MIC)

Residual Stress Of Tini Shape Memory Alloy Thin Films On Silicon Substrate

Residual Stress Measurement in Thin Films Using a Slitting Method with Geometric Phase Analysis under a Dual Beam (FIB/SEM) System

RESIDUAL STRESSES IN OBLIQUE INCIDENCE DEPOSITED ALUMINA THIN FILM

Residual Stress Relaxation in the Film/substrate System Due to Creep Deformation

Thermal Annealing Effect on Surface-Enhanced Raman Scattering of Gold Films Deposited on Liquid Substrates

Residual Stress Analysis in the Film/Substrate System with the Effect of Creep Deformation

Annealing of focused ion beam damage in gold microcrystals: An in situ Bragg coherent X-ray diffraction imaging study

Effect of Current Density on the Deposit Stress in Gold Electroplating

Effects of pre-strain and stress level on stress relaxation ageing behaviour of 2195 Al-Li alloy: Experimental and constitutive modelling

Effect of applied stress level on anisotropy in creep-aging behavior of Al–Cu–Li alloy