Abstract:Two-dimensional (2D) materials are a new material system with interesting and extraordinary physical properties. These characteristics make them have many applications including field-effect transistor (FET), flexible electronics, and optoelectronic devices [ 1,2,3 ]. Transition Metal Dichalcogenides (TMDs), such as MoS2 and WSe2, are drawn much attentions, because they have direct bandgap if they are monolayer. Acquisition of large area MoS2 flakes using chemical vapor deposition (CVD) method is feasible. Here, we report a method to optimize the uniformity and the size of MoS2 few-layered films. The growth substrates were placed up-side down on the MoO3 source with the separation (d) of 7 to 9 mm during the growth (figure 1a). The resulting films were significantly different (figures 1b-d). Based on the results, the MoS2 films grown when the separation is 8mm have the best uniformity and largest area (figure 1c). The MoS2 films are as large as 1 cm2, which is 3-3.5 times larger than that grown from other separation parameters. The number of MoS2 films was identified to be monolayer from Raman analysis (E1 2g to A1g peak difference is about 20.5 cm-1) and photoluminescence analysis (a peak at ~677 nm). The detailed growth mechanism of large area MoS2 films is discussed in this study. References Yin, ZY et al, ACS NANO., 6, 74-80 (2012). Tsai, ML et al, ACS NANO., 8, 8317-8322 (2014). Lopez-Sanchez, O et al, Nature Nanotechnology., 8, 497-501 (2013) Figure 1

Effect of hydrogen on the growth of MoS2 thin layers by thermal decomposition method

Role of hydrogen in the chemical vapor deposition growth of MoS2 atomic layers.

Oxygen Effects on the Structure and Hydrogenation Activity of the MoS2 Active Site: A Mechanism Study by DFT Calculation

Direct Chemical Vapor Deposition Growth and Band-Gap Characterization of MoS2/h-BN van der Waals Heterostructures on Au Foils

Role of hydrogen in chemical vapor deposition growth of MoS 2 atomic layers

Controllable Growth and Transfer of Monolayer MoS2 on Au Foils and Its Potential Application in Hydrogen Evolution Reaction.

Controllable Growth of MoS2 on Au Foils and Its Application in Hydrogen Evolution

Low-temperature synthesis of uniform monolayer molybdenum disulfide films

Experimental and theoretical investigation on pre-deposited precursor as growth sites for monolayer MoS 2 growth by supercritical fluid deposition

Atomic Layer Deposition of Molybdenum Disulfide Films Using MoF6 and H2S

Controlled Growth of Bilayer-MoS2 Films and MoS2-Based Field-Effect Transistor (FET) Performance Optimization

Effect of MoO3 Vapor Flow to Large Area MoS2 Few-Layered Films Growth

Effect of temperature on the growth of two-dimensional MoS2 on low-cost soda-lime glass

Targeted Synthesis of 2H‐ and 1t‐phase MoS2 Monolayers for Catalytic Hydrogen Evolution

The effect of sulfuration reaction rates with sulphur concentration gradient dependence on the growth pattern and morphological evolution of MoS2 in laminar flow

Nanoscale Insights into the Hydrogenation Process of Layered Α-Moo3.

Hydrothermal synthesis and characterization of laminar MoS2

Monolayer MoS2 Growth on Au Foils and On‐Site Domain Boundary Imaging

Scalable growth of atomically thin MoS2 layers in a conventional MOCVD system using molybdenum dichloride dioxide as the molybdenum source

Oxygen-Assisted Chemical Vapor Deposition Growth of Large Single-Crystal and High-Quality Monolayer MoS2.

Substrate Facet Effect on the Growth of Monolayer MoS2 on Au Foils.