Abstract:Layered transition metal dichalcogenide (TMDC) materials have received great attention because of their remarkable electronic, optical, and chemical properties. Among typical TMDC family members, monolayer MoS2 has been considered a next-generation semiconducting material, primarily due to a higher carrier mobility and larger band gap. The key enabler to bring such a promising MoS2 layer into mass production is chemical vapor deposition (CVD). During CVD synthesis, gas-phase sulfidation of MoO3 is a key elementary reaction, forming MoS2 layers on a target substrate. Recent studies have proposed the use of gas-phase H2S precursors instead of condensed-phase sulfur for the synthesis of higher-quality MoS2 crystals. However, reaction mechanisms, including atomic-level reaction pathways, are unknown for MoO3 sulfidation by H2S. Here, we report first-principles quantum molecular dynamics (QMD) simulations to investigate gas-phase sulfidation of MoO3 flake using a H2S precursor. Our QMD results reveal that gas-phase H2S molecules efficiently reduce and sulfidize MoO3 through the following reaction steps: Initially, H transfer occurs from the H2S molecule to low molecular weight Mo xO y clusters, sublimated from the MoO3 flake, leading to the formation of molybdenum oxyhydride clusters as reaction intermediates. Next, two neighboring hydroxyl groups on the oxyhydride cluster preferentially react with each other, forming water molecules. The oxygen vacancy formed on the Mo-O-H cluster as a result of this dehydration reaction becomes the reaction site for subsequent sulfidation by H2S that results in the formation of stable Mo-S bonds. The identification of this reaction pathway and Mo-O and Mo-O-H reaction intermediates from unbiased QMD simulations may be utilized to construct reactive force fields (ReaxFF) for multimillion-atom reactive MD simulations.

Role of hydrogen in chemical vapor deposition growth of MoS 2 atomic layers

Role of hydrogen in the chemical vapor deposition growth of MoS2 atomic layers.

Direct Chemical Vapor Deposition Growth and Band-Gap Characterization of MoS2/h-BN van der Waals Heterostructures on Au Foils

Oxygen Effects on the Structure and Hydrogenation Activity of the MoS2 Active Site: A Mechanism Study by DFT Calculation

Adsorption and Dissociation of H2s on Mo(100) Surface by First-Principles Study

Revealing the Microscopic CVD Growth Mechanism of MoSe2 and the Role of Hydrogen Gas During the Growth Procedure.

The Role of Hydrogen in Oxygen-Assisted Chemical Vapor Deposition Growth of Millimeter-Sized Graphene Single Crystals

Hydrogenation and defect formation control the strength and ductility of MoS2 nanosheets: Reactive molecular dynamics simulation

Experimental and theoretical investigation on pre-deposited precursor as growth sites for monolayer MoS 2 growth by supercritical fluid deposition

Elucidation of Zero‐Dimensional to Two‐Dimensional Growth Transition in MoS2 Chemical Vapor Deposition Synthesis

From Molecular Precursors to MoS 2 Monolayers: Nanoscale Mechanism of Organometallic Chemical Vapor Deposition

Li Adsorption on Monolayer and Bilayer MoS 2 As an Ideal Substrate for Hydrogen Storage

Controllable Growth of MoS2 on Au Foils and Its Application in Hydrogen Evolution

Elucidation of Zero-Dimensional to Two-Dimensional Growth Transition in MoS<sub>2</sub>Chemical Vapor Deposition Synthesis

Nanoscale Insights into the Hydrogenation Process of Layered Α-Moo3.

Role of the carrier gas flow rate in monolayer MoS 2 growth by modified chemical vapor deposition

Role of H Transfer in the Gas-Phase Sulfidation Process of MoO3: A Quantum Molecular Dynamics Study

Exploring Kinetic Control for the Growth of Layered MoS2(1-x)Se2x Alloy and Its Electrocatalytic Activity in Hydrogen Evolution Reaction

Targeted Synthesis of 2H‐ and 1t‐phase MoS2 Monolayers for Catalytic Hydrogen Evolution

Structural Aspects of MoS x Prepared by Atomic Layer Deposition for Hydrogen Evolution Reaction

Dominant Kinetic Pathways of Graphene Growth in Chemical Vapor Deposition: The Role of Hydrogen