Identification of the dissociative and kick-out diffusion mechanisms of Zn diffusion in GaAs by photoluminescence analysis

hong ye,liangliang tang,qing ni
DOI: https://doi.org/10.1016/j.mseb.2015.03.005
2015-01-01
Abstract:•Zn diffusion in GaAs differs when Zn/Ga alloy is used instead of Zn/As alloy.•Ga atoms could suppress the high-concentration surface region of the Zn profile.•Photoluminescence analysis was used to identify the diffusion mechanisms.•Ga vacancies were found in the surface region of the kink-and-tail profile.•Ga vacancy was not found in the box profile and the tail of kink-and-tail profile.
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