Electrodeposition of High-Tc Superconductor Material for Microsensor Fabrication

Natarajan A.,Wang W.,Ma E.,Bhattacharya R. N.,Khan-Malek C.,Paranthaman M.,Martin P. M.
DOI: https://doi.org/10.1557/proc-451-401
1996-01-01
Abstract:Thin-films of YBa2Cu3O7 (YBCO) superconductor precursor were synthesized using an electrodeposition process. The YBCO precursor thin films were deposited on Ag foils using pulsed potential deposition conditions of 10 s at - 4 V and 10 s at -1 V (versus Ag reference electrode). The post-annealed films showed zero electrical resistance at 60 K. The procedures for the fabrication of a high precision micro-sensor using YBCO superconductor for measurement of weak magnetic fields are outlined. The micro-sensor templates were patterned using X-rays and precursor films were deposited into the features.
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