Polarization Control over Deep Ultraviolet Light by Subwavelength Metallic Gratings

xiaodi tan,guoguo kang
DOI: https://doi.org/10.1364/jsap.2014.18p_c3_1
2014-01-01
Abstract:Using subwavelength structures to manipulate the polarization of deep ultraviolet (DUV) light is generally known as difficult with the current nano-fabrication technologies. To ease the fabrication, an aluminum grating with its period slightly smaller than the DUV wavelength was designed to exhibit an inverse polarizing effect. At resonance, a pronounced inverse polarization extinction ratio of 35 dB was obtained in our experiment.
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