Abstract:The study of the crystal structure, morphology, emission, and electrical parameters of Mg x Zn 1−x O films with varied Mg contents (0, 10, 20, 30 at%) is presented. The films were prepared by spray pyrolysis using two types of precursors: Mg acetate tetrahydrate or Mg chloride hexahydrate, with followed by annealing at 350 °C for 3 h. Using X-ray energy dispersive spectroscopy (EDS) it was revealed that the films obtained with a Mg chloride precursor have lower Mg contents, together with a higher density of crystalline grains and smaller grain sizes, compared to the films obtained with a Mg acetate precursor. All the films studied are characterized by the wurtzite crystalline structure, but the intensity of the X-ray diffraction (XRD) peaks was significantly lower in the films obtained with a Mg chloride precursor. Three photoluminescence (PL) bands: orange, green and blue were detected in the PL spectra of the studied films. With increasing Mg content, the blue near band edge (NBE) PL band decreases in both types of films along with increasing intensity of defect related green PL band and increasing electrical resistivity. The different characteristics of the films are analyzed and discussed. Mg x Zn 1−x O films prepared with the Mg acetate precursor are interesting for optoelectronic applications.

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