Bias In Parameter Estimation Of Form Errors

xiaoying he,hao zhang,xiangchao zhang,min xu
DOI: https://doi.org/10.1088/2051-672X/2/3/035006
2014-01-01
Abstract:The surface form qualities of precision components are critical to their functionalities. In precision instruments algebraic fitting is usually adopted and the form deviations are assessed in the z direction only, in which case the deviations at steep regions of curved surfaces will be over-weighted, making the fitted results biased and unstable. In this paper the orthogonal distance fitting is performed for curved surfaces and the form errors are measured along the normal vectors of the fitted ideal surfaces. The relative bias of the form error parameters between the vertical assessment and orthogonal assessment are analytically calculated and it is represented as functions of the surface slopes. The parameter bias caused by the non-uniformity of data points can be corrected by weighting, i.e. each data is weighted by the 3D area of the Voronoi cell around the projection point on the fitted surface. Finally numerical experiments are given to compare different fitting methods and definitions of the form error parameters. The proposed definition is demonstrated to show great superiority in terms of stability and unbiasedness.
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