ZnO nanowires based UV photodiodes

lei luo,yanfeng zhang,samuel s mao,liwei lin
DOI: https://doi.org/10.1109/MEMSYS.2005.1453958
2005-01-01
Abstract:An n-type zinc oxide (ZnO) nanowires and p-type silicon heterojunction has been successfully constructed to demonstrate UV (ultra-violet) photodiodes. The prototype device consists of unintentionally doped n-type ZnO nanowires in the range of 70120 nanometers in diameter synthesized by the bottom-up vapor-liquid-solid growth process. The nanowires are grown on top of a (100) p-silicon substrate with a doping level of similar to 10(18) cm(-3) to form the heterojunction. The isolation is achieved by using spin-on glass (SOG) that also works as the foundation of the top electrode. The current-voltage characteristics show the typical rectifying behavior of heterojunctions, and the photodiode exhibits response of 0.07 A/W for UV light (365 nm) under a 20V reverse bias.
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