Deposition Of Sol-Gel Derived Inorganic And Composite Material Films On Inp For Integrated Optics

J Liu,Yl Lam,Yc Chan,Y Zhou,Wx Que,G Tan,Bs Ooi
DOI: https://doi.org/10.1117/12.370341
1999-01-01
Abstract:In this paper, we present the fabrication of sol-gel derived silica based films on InP using both inorganic and composite material precursors. Thin silica films with thicknesses less than 0.5 mu m are achieved using an inorganic precursor by means of multiple spin coatings and rapid thermal processing (RTP) at an annealing temperature of 450 degrees C. The cracking pattern of the inorganic silica film on InP is analyzed. Thick films are derived from composite materials by multiple spin coatings with only furnace baking at 150 degrees C. In addition, the different properties of each type of films and their potential applications in terms of monolithic integration are discussed.
What problem does this paper attempt to address?