Abstract:Waveguide thin films with thickness more than one and a half micron were prepared by the sol-gel spin coating technique and low temperature heat treatment from relatively high titanium content organically modified silanes (ORMOSIL). The films were analyzed by Xray diffraction (XRD), ellipsometry, atomic force microscopy (AFM), thermal gravimetric analysis (TGA), UV-visible spectroscopy (UV-vis), and Fourier transform infrared spectroscopy (FTIR) to study their optical and microstructural properties. It was observed that the him becomes thinner as the titanium content increases. A change of the refractive index through the range 1.44-1.55 at the optical wavelength of 633 nm was achieved by varying the molar ratio between ORMOSIL and titanium. UV-vis transmission spectroscopy and AFM results showed that macro-pore free and high transparency (in the visible range) waveguide films could be obtained at both low and high temperatures. While at low temperatures, our simpler recipe produced as good films as previously reported, it:was noted that purely inorganic and crack-free silica-titania films with a thickness of about 0.5 mu m could also be obtained when the film was baked at a temperature of 500 degrees C or higher. Meanwhile, our films obtained after a high temperature heat treatment showed a hardness that is dependent on the heat treatment temperature. A hardness as high as 10.0 CP was achieved at a heal treatment temperature of 1000 degrees C and we believe that this is a result of the formation of TiC structure. (C) 2000 Elsevier Science S.A. All rights reserved.

Optical and microstructural properties of sol–gel derived titania/organically modified silane thin films

Optical and mechanical properties of TiO2/SiO2/organically modified silane composite films prepared by sol–gel processing

Sol-Gel Derived Titaniajormosil Composite Thin Films For Optical Waveguide Applications

Characteristics of laser-densified and conventionally heat treated sol–gel derived silica–titania films

Sol-gel processed silica/titania/ÿ-Glycidoxypropyltrimethoxysilane composite materials for photonic applications

Preparation and Characterizations of TiO2/Organically Modified Silane Composite Materials Produced by the Sol-Gel Method

Spectroscopic Investigations on Sol–gel Derived Organic–inorganic Hybrid Films for Photonics from Ormosils and Tetrapropylorthotitanate

Influence of Titanium Content and Temperature on Optical and Mechanical Properties of Sol Gel Derived TiO2/ -Glycidoxypropyltrimethoxysilane and Methyltrimethoxysilane Hybrid Organic Inorganic Films

Effects of titanium content on properties of sol-gel silica-titania films via organically modified silane precursors

Microstructural and Spectroscopic Studies of Sol-Gel Derived Silica-Titania Waveguides

Preparation And Properties Of Organically Modified Sol-Gel Silica/Titania Optical Waveguides

Sol-Gel Fabrication of Low Temperature Organic-Inorganic Hybrid Film Patterns for Photonic Applications

Sol-gel fabrication and properties of optical channel waveguides and gratings made from composites of titania and organically modified silane

Effects of Titanium Content on Sol-Gel Hard Optical Films Prepared in an Organic-Inorganic Hybrid System

Sol-Gel Preparation of Titania/Organic Silicone Hybrid Thin Films

Sol-Gel Derived Titania/γ-Glycidoxypropyltrimethoxysilane and Methyltrimethoxysilane Hybrid Materials for Optical Waveguides

Preparation and characterizations of SiO2/TiO2/γ-glycidoxypropyltrimethoxysilane composite materials for optical waveguides

Preparation of hard optical coatings based on an organic/inorganic composite by sol–gel method

Optical and Mechanical Properties of Sol–gel Silica–titania Hard Optical Coatings Derived from Methyltrimethoxysilane and Tetrapropylorthotitanate As Precursors

Sol–gel Preparation of Thick Titania Coatings Aided by Organic Binder Materials

Investigation on the Microstructure and Optical Performance of TiO_2 Films by Sol-Gel Method