Development of High Resolution Zone Plate by Holography and Ion-Etching Techniques

Yong-Gang Su,Shao-Jun Fu,Xiao-Min Tao,Yi-Lin Hong,Yun-Wu Zhang

DOI: https://doi.org/10.1117/12.939105

1988-01-01

Abstract:The purpose of development and the processing steps to fabricate high resolution zone plates, especially holographic exposure and ion-etching, are described. Also the experimental results and some prospects are presented.

What problem does this paper attempt to address?

Computer-Generated Holograms For 3d Objects Using The Fresnel Zone Plate

Xiaojie Zhang,Xü Liu,Xiaoxi Chen

DOI: https://doi.org/10.1117/12.570412

2005-01-01

Abstract:A new fast algorithm using the "host" Fresnel zone plate was proposed to improve the computational efficiency of computer-generated hologram (CGH) for 3D objects. By reading.3DS files, the spatial position information of each point of the 3D object was obtained directly. With the illumination of plane wave, the "host" Fresnel zone plate of a single point could be equal to all points located in the same depth plane - as the Fresnel zone plate was translated and superimposed along the horizontal and vertical axes. Consequently, the hologram of a 3D object could be built up by superimposing different Fresnel zone plates in the corresponding depth planes. For a digital object composed of 1060 points, it cost about 83s to generate a hologram of 1024*768 pixels. The CGH of 3D objects with the results of the reconstruction was presented in this paper, which proved the feasibility of this algorithm.
Fabrication of the High Resolution X-Ray Diffractive Element

Ying XIONG,Gang LIU,Yangchao TIAN

DOI: https://doi.org/10.3969/j.issn.1004-1699.2014.02.004

2014-01-01

Abstract:The X-ray zone plate is the core diffraction element in the high-resolution X-ray imaging system. The resolution of the X-ray imaging system depends on the outer zone width of the zone plate. We carried on experimental researches of the electron beam lithography and high precision plating of the nanostructures. First,via the optimization of the layout of the electron beam lithography process,it reduced the influence on the nanostructures of the proximity effect and controlled the distortion or collapse of the photoresist efficiently. The result indicated that it is capable to fabricate the high resolution X-ray zone plate photoresist masks with the thickness of 270 nm and the outmost zone width of 50 nm using the calibration layout by the electron beam lithography in line exposure with the dose of 800 pC/cm2 . Second,we chose appropriate plating parameters of the precision electroplating experiments in the solution of potassium citric monohydrate. The high resolution X-ray zone plates were electroplating with the elec-troplating solution(10% in gold),pH value of 4. 2,temperature of 50 ℃ and the electric current of 0. 2 A/dm2.
Fabrication of X-ray Imaging Zone Plates by E-Beam and X-ray Lithography

Longhua Liu,Gang Liu,Ying Xiong,Jie Chen,Wenjie Li,Yangchao Tian

DOI: https://doi.org/10.1007/s00542-009-0972-5

2009-01-01

Microsystem Technologies

Abstract:X-ray imaging and microscopy techniques have been developed in worldwide due to their capabilities of large penetration power and high spatial resolution. Fresnel zone plates is considered to be one of the most convenient optic devices for X-ray imaging and microscopy system. The zone plates with aspect ratio of 7 and 13 have been fabricated by e-beam lithography combined with X-ray lithography in this paper. Firstly, the X-ray lithography mask of zone plates with outermost zone width of 100 nm was fabricated by e-beam lithography and gold electroplating techniques. Secondly, the zone plates with gold profile thickness of 700 and 1,300 nm were replicated by X-ray lithography and gold electroplating techniques. X-ray imaging and microscopy techniques were introduced to characterize the high-aspect-ratio zone plates' inner structures. At the X-ray energy of 7.5 keV, the first-order focusing efficiency of zone plates with gold profile thickness of 700 nm is about 8.63%.
Optimized Phase Retrieval Method Based on Multi-Focus Property of Zone Plate

Binjie Lu,Lei Zhao,Jian Bai,Jing Hou,Hao Yan

DOI: https://doi.org/10.1117/12.2575068

2020-01-01

Abstract:As a computational imaging method, phase retrieval has wide applications in image reconstruction, wavefront detection, image encryption, etc. It is an image-based wavefront sensing technique and compared with some other traditional measurement methods such as interferometry, phase retrieval has the advantages of easy operation, high accuracy and strong adaptability to the environment. Conventional phase retrieval algorithms, such as the Gerchberg-Saxton (GS) algorithm, retrieve wavefront by iterative calculation. But limited by finite information of the captured diffractive light filed, the calculation process is easy to fall into local minimum value and stagnation occurs in practical, making it unable to converge to the right wavefront. In this paper, in order to improve this phenomenon, a phase retrieval method combined with the zone plate is proposed in this paper. In this method, zone plates are added into the traditional iterative phase retrieval algorithm to modulate the incident wavefront and combined with the multi-focus property, it can collect more effective information about the wavefront in a single optical intensity distribution image and realize a better wavefront reconstruction result. Simulation results indicate that by taking zone plates into calculation, more effective reconstruction results can be acquired. On the one hand, the recovery residual is smaller compared with conventional lens. On the other, although all of these methods reach to a stagnation, zone-plate-based methods are more efficient to get a better result.
Fabrication Of Holographic Microlenses Using A Deep Uv Lithographed Zone Plate

H Ming,Y Wu,J Xie,T Nakajima

DOI: https://doi.org/10.1364/AO.29.005111

IF: 1.9

1990-01-01

Applied Optics

Abstract:Holographic microlens arrays and elliptical zone plates are fabricated on holographic plates and photoresists by interference between the first- and second-order diffracted waves from an ion etched Fresnel zone plate, which is made by electron-beam scanning and deep UV lithography. This method of fabrication is simple, and a holographic lens with a large numerical aperture and short focal length is obtained. Experimental results of focusing and imaging by a lens array and an elliptical zone plate are given. Two methods of fabricating holographic zone plates for an IR or UV wavelength are also proposed.
X-ray Imaging Fresnel Zone Plates and Fabrication

CHEN Jie,LIU Long-hua,LIU Gang,TIAN Yang-chao

DOI: https://doi.org/10.3321/j.issn:1004-924x.2007.12.012

2007-01-01

Optics and Precision Engineering

Abstract:In order to investigate the principle and fabrication technique of Fresnel zone plates(FZPs),a diffractive optical element used in X-ray imaging with the best resolution currently is presented.A theoretical analysis of the spatial resolution depending on the outermost zone width is given.An analyrical expression of the diffraction efficiency in terms of thickness and X-ray refractive index of the zone plate is also provided.Electron beam lithography combined with X-ray lithography is employed to fabricate FZPs.Experimental results indicate that the outermost zone width is 150 nm and the aspect ratio is 4,which satisfies the X-ray imaging system requirements of high resolution.high aspect ratio as well as high precision.
Design and Fabrication of High Aspect-ratio Hard X-ray Zone Plates

Jie FU,Xiaohua WANG,Jinhua LI,Xuan FANG,Zhipeng WEI

DOI: https://doi.org/10.3969/j.issn.1003-501X.2014.03.002

2014-01-01

Abstract:The manufacture of high aspect-ratio hard X-ray zone plates for Inertial Confinement Fusion (ICF) experiment by using electron beam lithography and X-ray lithography was demonstrated. The X-ray lithography mask was first fabricated on hollow polyimide film to reduce the back-scattering during electron-beam lithography process. Then multiple X-ray exposures and full water electroplating method were used to increase the lodging resistance of the resist pattern. The zone plates with outermost zone width of 350 nm, profile thickness of 3.5μm, and aspect ratio of 10, were successfully fabricated by using the combined technology. The structure of zone plates is steep and has excellent graphics quality,and can be used for 10 to 30 keV X-ray imaging system.
High resolution X-ray microscopy and its new developments

Jie CHEN,Long-Hua LIU,Gang LIU,Yang-Chao TIAN

DOI: https://doi.org/10.3321/j.issn:0379-4148.2007.08.003

2007-01-01

Physics

Abstract:The background and principle of zone plate based high resolution X-ray microscopy is reviewed, as well as X-ray 3D imaging. The latest developments and future prospects in this field are also discussed.
Optically Inscribed Surface-Relief Zone Plates In Azo Polymer Films

Jun Yang,Bin Guo,Douguo Zhang,Pei Wang,Hai Ming,杨军,郭斌,张斗国,王沛,明海

IF: 2.56

2007-01-01

Chinese Optics Letters

Abstract:We describe a simple and cost-effective holographic method for the fabrication of surface-relief zone plates. The zone plate is inscribed by interference between the first- and second-order diffracted waves from an ion-etched Fresnel zone plate. The inscribed surface-relief zone plates are observed by atomic force microscope (AFM). The formation process of the surface grating and the mass diffusion in azo polymer are analyzed.
Fabrication of soft X-ray condenser zone plates

Shaojun Fu,Yilin Hong,X. M. Tao,Yonggang Su

1995-01-01

Abstract:Soft X-ray CZP (condenser zone plates) with three kinds of parameters have been fabricated by holograph-ion beam etching technique. The main processing steps include the fabrication of substrate, holographic lithography, ion beam etching, and gluing the support ring. The main parameters of the CZP were given. These three kinds of CZP have been used in the soft X ray microscopy experiments which act in combination with a pinhole as a linear monochromator.
Fabrication and application of X-ray zone plates

Xiangdong Xu,Yilin Hong,Shaojun Fu,Yunwu Zhang

1999-01-01

Guangxue Jishu/Optical Technique

Abstract:Owing to the low diffraction efficiency of zone plates, their application in the visible range is quite limited; however, in the X-ray range, they are the only one that can reach the diffraction limit so as to realize the theoretical resolution limit, hence there is considerable renewed interest in the zone plates now. An introduction on their fabrication method and applications was made here, besides, a review on the background, basic concepts, and classification of Fresnel zone plate and Bragg-Fresnel zone plate, which are the optical elements used for X-ray focusing and imaging, was also given.
Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography

Longhua Liu,Gang Liu,Ying Xiong,Jie Chen,Chunlei Kang,Xinlong Huang,Yangchao Tian

DOI: https://doi.org/10.1007/s00542-007-0542-7

2008-01-01

Microsystem Technologies

Abstract:High focusing efficiency Fresnel zone plates for hard X-ray imaging is fabricated by electron beam lithography, soft X-ray lithography, and gold electroplating techniques. Using the electron beam lithography, Fresnel zone plates which has an outermost zone width of 100 nm and thickness of 250 nm has been fabricated. Fresnel zone plates with outermost zone width of 150 nm and thickness of 660 nm has been fabricated by using soft X-ray lithography.
X-Ray Image Holography

朱佩平,高鸿奕,蒋诗平,陈敏,崔明启,徐至展,陈建文

DOI: https://doi.org/10.3321/j.issn:0253-2239.2001.07.019

2001-01-01

Abstract:A new method for taking X-ray image holograms with tens nanometer resolution is proposed. It employs two micro-zone-plates, one is for imaging and the other is for producing the reference. The holograms can be recorded in digital form by a charge-coupled device (CCD) camera. The device can also be used as an X-ray interferometer, called double-zone-plate X-ray interferometer.
Study on fabrication of Fresnel zone plate by LIGA technique

Yilin Hong,Yangchao Tian,Gang Liu,Shaojun Fu,Yiguan Hu,Tonglin Huo,X. M. Tao,Ya Kan

1999-01-01

Abstract:This paper described the fabrication of Fresnel zone plate with zone plate coded imaging of α particle using LIGA technique which is the combination of deep lithography, electroforming and molding. The structure and parameters affecting the resolution of the imaging were investigated. The design parameters were given.
High efficiency and scalable fabrication of fresnel zone plates using holographic femtosecond pulses

Zhipeng Wang,Lan Jiang,Xiaowei Li,Shuai Gao,Shipeng Zhou,Yang Liu,Lingling Huang,Jiangang Lu,Jiangang Yin

DOI: https://doi.org/10.1515/nanoph-2022-0112

IF: 7.5

2022-05-24

Nanophotonics

Abstract:To meet the growing demand for photonic integration and device miniaturization, planar diffractive Fresnel zone plates (FZPs) are widely applied in integrated optical systems. However, challenges remain in fabricating FZPs with high efficiency and satisfying the requirement for cross-scale fabrication. This paper details a high efficiency method for fabricating ultrathin FZPs of different scales on metal films by using holographic femtosecond lasers. The FZPs are split into a series of element patterns that are printed in order by using corresponding modulated femtosecond pulses. The fabricated FZPs are spliced by the printed element structures with no FZP size limitation in theory. FZPs with an area varying across three orders of magnitude are presented to demonstrate the capability of cross-scale fabrication. The fabricated FZPs possess an excellent broadband focusing and imaging ability in the visible spectrum. Furthermore, the fabrication of other functional ultrathin lenses, such as axial multifocal zone plates, petal-like zone plates, and FZP arrays, is described, revealing the wide potential for the flexible and scalable fabrication method in on-chip integrated optical systems.

optics,physics, applied,materials science, multidisciplinary,nanoscience & nanotechnology
Fabrication of Soft X-Ray Phase Condenser Zone Plates

Kai Xiao,Ying Liu,Xiangdong Xu,Shaojun Fu

DOI: https://doi.org/10.3321/j.issn:0253-2239.2005.12.027

2005-01-01

Abstract:Soft X-ray zone plate is an important element which has the function of concentration, dispersion and imaging in soft X-ray optics. An Au condenser phase zone plate mask is fabricated using holography and ion beam etching process. Soft X-ray Ge and Ni condenser phase zone plates are fabricated by ion-beam etching technology on polyimide substrate and contact synchrotron radiation lithography with the mask.
Preliminary Optical Design of an Imaging Soft X-Ray Microscopy (IXM) Beam Line and Fabrication of Zone Plates in Hefei

Yong-Gang Su,Shao-Jun Fu,Yun-Wu Zhang,Yi-Lin Hong,Xiao-Min Tao

DOI: https://doi.org/10.1117/12.964942

1986-01-01

Abstract:A design of an optical system for testing zone plates by imaging with soft x-ray microscope is presented. The progress of zone plates fabrication in Hefei is also described. Finally, some aspects of our future plan are mentioned too.
Super-resolution in Focusing System by Three-Zone Pure Phase Plate

Xiumin Gao,Qiufang Zhan,Jinsong Li,Jian Wang,Songlin Zhuang

DOI: https://doi.org/10.1117/12.831355

2009-01-01

Abstract:Superresolution is very important in imaging and optical storage systems, and has attracted much attention. In this article, concentric three-zone phase plate with 0, pi, 0 phase variation has been investigated numerically to show that this kind of phase plate can be used to obtain three dimensional superresolution. Focal depth, focal shift, full width half maximum, superresolution effect are listed for different radii of the phase zones, which paves the way for design of the phase plate, such as for purpose of radial superresolution with high focal depth in optical storage.
Bypassing the resolution limit of diffractive zone plate optics via rotational Fourier ptychography

Chengfei Guo,Shaowei Jiang,Pengming Song,Zichao Bian,Tianbo Wang,Pouria Hoveida,Xiaopeng Shao

DOI: https://doi.org/10.1016/j.optcom.2021.127031

2021-02-08

Abstract:Diffractive zone plate optics uses a thin micro-structure pattern to alter the propagation direction of the incoming light wave. It has found important applications in extreme-wavelength imaging where conventional refractive lenses do not exist. The resolution limit of zone plate optics is determined by the smallest width of the outermost zone. In order to improve the achievable resolution, significant efforts have been devoted to the fabrication of very small zone width with ultrahigh placement accuracy. Here, we report the use of a diffractometer setup for bypassing the resolution limit of zone plate optics. In our prototype, we mounted the sample on two rotation stages and used a low-resolution binary zone plate to relay the sample plane to the detector. We then performed both in-plane and out-of-plane sample rotations and captured the corresponding raw images. The captured images were processed using a Fourier ptychographic procedure for resolution improvement. The final achievable resolution of the reported setup is not determined by the smallest width structures of the employed binary zone plate; instead, it is determined by the maximum angle of the out-of-plane rotation. In our experiment, we demonstrated 8-fold resolution improvement using both a resolution target and a titanium dioxide sample. The reported approach may be able to bypass the fabrication challenge of diffractive elements and open up new avenues for microscopy with extreme wavelengths.

Optics,Image and Video Processing
Designing of Extended Frsenel Zone Plates for Focusing X-rays

国承山,任秀云,刘轩

DOI: https://doi.org/10.3969/j.issn.1672-755x.2004.02.003

2004-01-01

Abstract:We propose a novel method for extending the effective size of Fresnel zone plates (FZP) under the limitation of the smallest structure that can be fabricated by lithography today. This kind of extended Fresnel zone plates (EFZP) consists of two parts: the inner part and the outer part. The inner part is the same as the conventional FZP, while in the outer part the zones are produced by suitable extension based on the conventional FZP. The principle of the EFZP, some related design formulas and simulated results are given, which indicate that EFZP possesses higher resolution and smaller sub-maximum noise than those of the corresponding conventional FZP.

Development of High Resolution Zone Plate by Holography and Ion-Etching Techniques

Computer-Generated Holograms For 3d Objects Using The Fresnel Zone Plate

Fabrication of the High Resolution X-Ray Diffractive Element

Fabrication of X-ray Imaging Zone Plates by E-Beam and X-ray Lithography

Optimized Phase Retrieval Method Based on Multi-Focus Property of Zone Plate

Fabrication Of Holographic Microlenses Using A Deep Uv Lithographed Zone Plate

X-ray Imaging Fresnel Zone Plates and Fabrication

Design and Fabrication of High Aspect-ratio Hard X-ray Zone Plates

High resolution X-ray microscopy and its new developments

Optically Inscribed Surface-Relief Zone Plates In Azo Polymer Films

Fabrication of soft X-ray condenser zone plates

Fabrication and application of X-ray zone plates

Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography

X-Ray Image Holography

Study on fabrication of Fresnel zone plate by LIGA technique

High efficiency and scalable fabrication of fresnel zone plates using holographic femtosecond pulses

Fabrication of Soft X-Ray Phase Condenser Zone Plates

Preliminary Optical Design of an Imaging Soft X-Ray Microscopy (IXM) Beam Line and Fabrication of Zone Plates in Hefei

Super-resolution in Focusing System by Three-Zone Pure Phase Plate

Bypassing the resolution limit of diffractive zone plate optics via rotational Fourier ptychography

Designing of Extended Frsenel Zone Plates for Focusing X-rays