Abstract:Abstract. Fresnel zone plates (FZPs) are significant optical objects for extreme ultraviolet and x-ray microscopy, both of which are powerful tools due to their high spatial resolution and large penetration depth. Fabrication of FZPs is challenging as it requires high accuracy to achieve the narrow outmost zone and large aspect ratio. The focused ion beam (FIB) has been practically demonstrated as a potential alternative to electron beam lithography for its precision, rapidness, and mask-free essence. However, the common redeposition effect in the FIB process is a major obstacle to distort actual patterns from designed ones, especially for FZPs with outmost zone width of 100 nm and simultaneously aspect ratio beyond 2. We proposed an efficient method noted as single-pixel line-assisted sputtering (SLAS) to eliminate redeposition in situ during FZP fabrication. Through systematically optimizing parameters predominating ion dosages and, particularly, the positions of SLAS, we successfully obtained high-quality FZPs with outmost zone width down to 100 nm, perpendicular side walls, aspect ratio of up to 3 and diameter of 38 μm in 1.5 h. The application of SLAS also provides instructive guidance for other FIB processes to finely modulate the nanostructures.

Study on fabrication of Fresnel zone plate by LIGA technique

Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography

X-ray Imaging Fresnel Zone Plates and Fabrication

Fabrication of X-ray Imaging Zone Plates by E-Beam and X-ray Lithography

Design of LIGA end-station and its applications

Study on X-Ray Deep Lithography Process in LIGA Technique

Design and Fabrication of High Aspect-ratio Hard X-ray Zone Plates

A New Application Field of Synchrotron Radiation Lithography--liga Technique

Fabricating High-Quality Fresnel Zone Plates by Efficiently Eliminating Redeposition Based on Focused Ion Beam

Investigation on LIGA-like Process Based on Multilevel Imprint Lithography

High efficiency and scalable fabrication of fresnel zone plates using holographic femtosecond pulses

Direct-writing Electric-Controlled Micro Fresnel Zone Plate with Ferroelectric Domain In-Version

The Study on the Compound X-Ray Refractive Lens Using LIGA Technique

Primary study of deep-etch synchrotron radiation lithography

Application of LIGA process in fabrication of medical devices and systems

Fabrication and application of X-ray zone plates

Optically Inscribed Surface-Relief Zone Plates In Azo Polymer Films

Study on New Type Liga Mask Fabrication Technique

Fabrication of the High Resolution X-Ray Diffractive Element

Dielectric Fresnel Zone Plates on Optical Fibers for Micro-Focusing Applications

Experimental Verification of the Super-Resolution Focusing Optical Needle and Imaging with a New Type Fresnel Zone Plate