Abstract:Abstract X-ray microscope as an important nanoprobing tool is expected to play a powerful role in nano-inspections of materials. Despite the fast advances of high resolution focusing/imaging reported, the diffraction efficiency of existing binary zone plates as the lenses in the microscope is mostly around 5% in practice and rapidly goes down to 1-2% when the resolution approaches 10 nm, failing its applications in advanced scientific research. Zone plates with Kinoform profile are supposed to be high efficient, little progress for achieving both high resolution and high efficiency has been reported. The conflict between the resolution and the efficiency in X ray optics has become a long-lasting bottleneck in the further development of X-ray microscope. Based on our earlier success in developing high efficiency Kinoform zone plates by greyscale electron beam lithography, we proposed, in this work, a new zone plate structure by combing a dielectric Kinoform zone plate with an atomic layer deposited HfO2 zone plate to achieve high resolution focusing/imaging with high efficiency. Beam propagation method was applied in designing and optimizing Kinoform shapes of the zones, greyscale and/or binary electron beam lithography was carried out for generating both 3D Kinoform as well as rectangular zones with aspect ratio of 23/1 in dielectric resist, and finally high-quality atomic layer deposition of HfO2 was conducted to form the 15-nm wide outermost zone. Optical characterizations by an in-house developed soft X ray microscope demonstrated 15-nm resolution focusing/imaging with over 7% efficiency, which is the highest with such a resolution as far as our awareness. The origin of such an improvement behind the proposed novel lenses is interpreted by our BMP calculation results and the comparisons with existing performances by other reports in literature was discussed.

Direct-writing Electric-Controlled Micro Fresnel Zone Plate with Ferroelectric Domain In-Version

Electrically controllable liquid crystal paraxial Fresnel zone plate based on concentric zones patterned electrode

Polarization State Dependence of Laser-Induced Domain Nucleation in Lithium Niobate Crystals Investigated by Digital Holography

Flat Optical Lens by Use of 90-Degree Volume Holographic Grating Recording Geometry and Nonvolatile Thermal Fixing in LiNbO3:Fe Crystal

Dielectric Fresnel Zone Plates on Optical Fibers for Micro-Focusing Applications

Micro-patterned Photo-Aligned Ferroelectric Liquid Crystal Fresnel Zone Lens.

Influences of focusing conditions on optical poling in lithium niobate using a 1035 nm femtosecond fiber laser

Rapid fabrication of an electrically switchable liquid crystal Fresnel zone lens.

Ferroelectric Domain Reversal Dynamics in LiNbO3 Optical Superlattice Investigated with a Real-Time Monitoring System

Fabrication of Micron scale Ferroelectric Domain of Lithium Niobate by Applying High Voltage to Pinpoint

Electromagnetic Exploration of Focusing Properties of High-Numerical-aperture Micro-Fresnel Zone Plates

Femtosecond laser writing of lithium niobate ferroelectric nanodomains

High-efficiency focusing and imaging by dielectric kinoform zone plate lenses with soft X-rays.

Dual‐Wavelength Focusing Through Fresnel Zone Plate Fabricated in Lithium Niobate Crystal by Femtosecond Laser Micromachining

Performance Test of Fresnel Zone Plate with 50 nm Outermost Zone Width in Hard X-ray Region

A dielectric Kinoform zone plate with 15 nm resolution and high efficiency for soft X-ray optics

Micro-Buried Spiral Zone Plate in A Lithium Niobate Crystal

Graphical Direct-Writing of Macroscale Domain Structures with Nanoscale Spatial Resolution in Non-Polar-Cut Lithium Niobate on Insulators

Study on fabrication of Fresnel zone plate by LIGA technique

Ferroelectric Nanodomain Engineering in Bulk Lithium Niobate Crystals in Ultrashort-Pulse Laser Nanopatterning Regime

Ferroelectric Domain Engineering by Focused Infrared Femtosecond Pulses