Abstract:Gratings are key components in many optical systems such as spectrometers. Improving their dispersion is very important for their applications, but improving the single-order diffraction efficiency of an ultrahigh dispersion grating is still very challenging. Here, we propose an analytical approach for the design of a new type of grating named hybrid grating, which consists of a subwavelength grating and a non-subwavelength grating. The proposed analytical approach is based on a physical model in which the non-subwavelength grating acts as an ultrathin reflection grating and the subwavelength grating acts as an antireflection coating. Using the rigorous coupled-wave analysis and the finite-difference time-domain method, we numerically demonstrate that multiple hybrid gratings designed at different wavelengths using the proposed analytical approach show a diffraction efficiency of greater than 95 % in the -1st diffraction order for TE-polarized light, an angular dispersion of greater than 0.8 mrad/nm and a deflection angle of greater than 80 degrees. Furthermore, we numerically demonstrate that by using a combined approach to optimize the parameters of a hybrid grating, the diffraction efficiency in the -1st diffraction order for TE-polarized light can be increased to more than 97 % under the condition that the angular dispersion and the deflection angle of the hybrid grating remain unchanged. Our work provides an avenue for rapid design of gratings with high angular dispersion, large deflection angle and high diffraction efficiency.

Enlarging applicability domain of the C method with piecewise linear parameterization: gratings of deep and smooth profiles

Simple parameterized coordinate transformation method for deep- and smooth-profile gratings.

Design of Large-Deflection-angle High-Diffraction-efficiency High-Dispersion Hybrid Gratings

Surface-relief Gratings with Sharp Edges: Improvement of the Convergence of the Coordinate Transformation Method

Simple Reformulation of the Coordinate Transformation Method for Gratings with a Vertical Facet or Overhanging Profile.

Coordinate Transformation Method: Theoretical Analysis And Numerical Improvement Of Convergence

Some topics in extending the C method to multilayer gratings of different profiles

Using symmetries of grating groove profiles to reduce computation cost of the C method.

Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings

A novel tool path generation algorithm for plane envelope grinding convex surface based on constant scallop height method

Improvement Of The Coordinate Transformation Method For Surface-Relief Gratings With Sharp Edges

Numerical Stability of the C Method and a Perturbative Preconditioning Technique to Improve Convergence.

Analysis of Faceted Gratings Using C-Method and Polynomial Expansion

Rigorous and Efficient Grating-Analysis Method Made Easy for Optical Engineers.

Optimizing the Varied Line-Space Grating with the Curvature of Grating Substrate

Improved composite Fourier transform profilometry

On the Convergence of the Coupled-Wave Approach for Lamellar Diffraction Gratings

Generalized Method for Designing Concave Gratings for Microspectrometer

Efficient Implementation of Rigorous Coupled-Wave Analysis for Analyzing Binary Gratings

Modal Theory of Lamellar Gratings in a Conical Diffraction Mount

Optimization of Nonbinary Slanted Surface-Relief Gratings As High-Efficiency Broadband Couplers for Light Guides.