Abstract:The use of Immersed Gratings offers advantages for both space- and ground-based spectrographs. As diffraction takes place inside the high-index medium, the optical path difference and angular dispersion are boosted proportionally, thereby allowing a smaller grating area and a smaller spectrometer size. Short-wave infrared (SWIR) spectroscopy is used in space-based monitoring of greenhouse and pollution gases in the Earth atmosphere. On the extremely large telescopes currently under development, mid-infrared high-resolution spectrographs will, among other things, be used to characterize exo-planet atmospheres. At infrared wavelengths, Silicon is transparent. This means that production methods used in the semiconductor industry can be applied to the fabrication of immersed gratings. Using such methods, we have designed and built immersed gratings for both space- and ground-based instruments, examples being the TROPOMI instrument for the European Space Agency Sentinel-5 precursor mission, Sentinel-5 (ESA) and the METIS (Mid-infrared E-ELT Imager and Spectrograph) instrument for the European Extremely Large Telescope. Three key parameters govern the performance of such gratings: The efficiency, the level of scattered light and the wavefront error induced. In this paper we describe how we can optimize these parameters during the design and manufacturing phase. We focus on the tools and methods used to measure the actual performance realized and present the results. In this paper, the bread-board model (BBM) immersed grating developed for the SWIR-1 channel of Sentinel-5 is used to illustrate this process. Stringent requirements were specified for this grating for the three performance criteria. We will show that -with some margin- the performance requirements have all been met.

Silicon Immersion Gratings for Very High Resolution Infrared Spectroscopy

Design of Compact Wide-Band Triple Grating Imaging Spectrometer Based on Freeform Surfaces

An Echelle Diffraction Grating for Imaging Spectrometer

Third Order Silicon (si) Nitride Side-Walled Grating Using Silicon-on- Insulatir (SOI)

Performance of Silicon immersed gratings: Measurement, analysis and modelling

Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror

High-efficiency Visible and Near-Infrared Transmission Gratings in Fused Silica for Astronomical Ground-Based Telescope Spectrographs

Echelle Diffraction Grating Based High-Resolution Spectrometer-on-chip on SiON Waveguide Platform

The Infrared Imaging Spectrograph (IRIS) for TMT: Volume phase holographic grating performance testing and discussion

Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching

Imaging Spectrometers Based on Waveguide Echelle Diffraction Gratings

Silicon-On-Insulator Based Miniature Integrated Spectrometer Using Echelle Diffraction Grating

Extreme Ultraviolet and Soft X-Ray Diffraction Efficiency of a Blazed Reflection Grating Fabricated by Thermally Activated Selective Topography Equilibration

Silicon-Based Arrayed Waveguide Gratings for WDM and Spectroscopic Analysis Applications

Design of Compact Mid-Infrared Cooled Echelle Spectrometer Based on Toroidal Uniform-Line-Spaced (TULS) Grating

Wide spectral range guided-mode resonant grating designed for the wet etching process

Direct Design Method for Holographic Grating Imaging Spectrometer and Corresponding Recording System

Arrayed waveguide grating spectrometers for astronomical applications: new results

Long-period suspended silicon Bragg grating filter for hybrid near- and mid-infrared operation

Large-aperture wide-bandwidth antireflection-coated silicon lenses for millimeter wavelengths

Convex Blazed Grating of High Diffraction Efficiency Fabricated by Swing Ion-Beam Etching Method.