Screen-printed Free-Standing Piezoelectric Devices Using Low Temperature Process

Nursabirah Jamel,Ahmed Almusallam,Dibin Zhu,Russel Torah,Kai Yang,John Tudor,Steve Beeby
DOI: https://doi.org/10.1109/dtip.2015.7160968
2015-01-01
Abstract:This paper reports, the fabrication by screen-printing and characterization of different types of free-standing structures. The process is based upon sacrificial surface micromachining using a water-based removal method enabling the fabrication of free-standing structures. Diaphragms, cantilevers and encastre beam structures have been fabricated simultaneously on a single substrate, demonstrating the feasibility of mass production.
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