Amorphous Silicon Nitride Binary-Phase Optical Elements

Xf Huang,Wq Gao,Zf Li,Xf Gu,J Zhou,Kj Chen
DOI: https://doi.org/10.1117/12.190750
1994-01-01
Abstract:We report a new type of binary-phase optical beam splitters combined with a two-dimensional Dammann grating and a Fresnel zone plate as one element which has both functions of beam splitting and focussing. Amorphous silicon nitride (a-SiNx:H) thin films deposited by plasma enhanced chemical vapor deposition (PECVD) method have been used for fabricating such an optical element. We have obtained 3 X 3 arrays of equal intensity and focused beams which generated by the beam splitter based on our own design. The relative distribution error of the intensity in each beam of the array is less than 5%.
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