Integrated Zno Surface Acoustic Wave Microfluidic And Biosensor System

D. S. Lee,Y. Q. Fu,S. Maeng,X. Y. Du,S. C. Tan,J. K. Luo,A. J. Flewitt,S. H. Kim,N. M. Park,Y. J. Choi,H. C. Yoon,S. Y. Oh,W. I. Milne
DOI: https://doi.org/10.1109/IEDM.2007.4419082
2007-01-01
Abstract:This paper presents the development of a novel portable cancer diagnostic system, based on thin film ZnO surface acoustic wave device, with integrated functions of microfluidic transport, mixing and bio-detection devices. The device is easily integrated with electronic control circuitry and fabricated with low temperature on Si, glass or even polymer substrates. Such a system is targeted at both the consumer market for self-diagnosis and the professional healthcare market for real-time diagnosis in a hospital and clinic environment.
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