A Surface Acoustic Wave-Based Immunosensing Device Using a Nanocrystalline ZnO Film on Si.

Dae-Sik Lee,Jun Hwang Lee,Jikui Luo,Yongqing Fu,William I. Milne,Sunglyul Maeng,Mun Yeon Jung,Sun Hee Park,Hyun C. Yoon
DOI: https://doi.org/10.1166/jnn.2009.1662
2009-01-01
Journal of Nanoscience and Nanotechnology
Abstract:The novelty of this study resides in the fabrication of a bio-sensing device, based on the surface acoustic wave (SAW) on a nanocrystalline ZnO film. The ZnO film was deposited using an rf magnetron sputtering at room temperature on silicon. The deposited films showed the c-axis-oriented crystallite with grain size of approximately 40 nm. The immunosensing device was fabricated using photolithographic protocols on the film. As a model biomolecular recognition and immunosensing, biospecific interaction between a 6-(2,4-dinitrophenyl)aminohexanoic acid (DNP) antigen and its antibody was employed, demonstrating the shifts of resonant frequencies on SAW immunosensing device. The device exhibited a linearity as a function of the antibody concentration in the range of 20-20,000 ng/ml.
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