Abstract:To date, most surface acoustic wave (SAW) devices have been made from bulk piezoelectric materials, such as quartz, lithium niobate or lithium tantalite. These bulk materials are brittle, less easily integrated with electronics for control and signal processing, and difficult to realize multiple wave modes or apply complex electrode designs. Using thin film SAWs makes it convenient to integrate microelectronics and multiple sensing or microfluidics techniques into a lab-on-a-chip with low cost and multi-functions on various substrates (silicon, glass or polymer). In the work, aluminum nitride (AlN)-based SAW devices were fabricated and characterized for discrete microfluidic (or droplet based) applications. AlN films with a highly c -axis texture were deposited on silicon substrates using a magnetron sputtering system. The fabricated AlN/Si SAW devices had a Rayleigh wave mode at a frequency of 80.3 MHz (with an electromechanical coupling coefficient k 2 of 0.24 % and phase velocity v p of 5,139 m/s) and a higher-frequency-guided wave mode at 157.3 MHz (with a k 2 value of 0.22 % and v p of 10,067 m/s). Both modes present a large out of band rejection of ~15 dB and were successfully applied for microfluidic manipulation of liquid droplets, including internal streaming, pumping and jetting/nebulization, and their performance differences for microfluidic functions were discussed. A detailed investigation of the influences of droplet size (ranging from 3 to 15 μL) and RF input power (0.25–68 W) on microdroplet behavior has been conducted. Results showed that pumping and jetting velocities were increased with an increase of RF power or a decrease in droplet size.

Nanocrystalline ZnO Film Layer on Silicon and Its Application to Surface Acoustic Wave-Based Streaming.

Femtosecond Laser Micromachining of the Mask for Acoustofluidic Device Preparation

Zno Films For Surface Acoustic Wave Microfluidic Devices

ZnO Film Thickness Effect on Surface Acoustic Wave Modes and Acoustic Streaming

ZnO film for application in surface acoustic wave device

Microfluidics Based on ZnO/nanocrystalline Diamond Surface Acoustic Wave Devices.

ZnO Thin Film Surface Acoustic Wave Based Lab-on-a-chip

SAW Streaming in ZnO Surface Acoustic Wave Micromixer and Micropump

Synthesis of Surface Acoustic Wave Filter with Al/ZnO Thin Film Deposited on Silicon Wafer

Recent Developments on ZnO Films for Acoustic Wave Based Bio-Sensing and Microfluidic Applications: a Review

Characterization of the Surface Acoustic Wave Devices Based on ZnO/nanocrystalline Diamond Structures

Comparative Study on Microfluidic Performance of ZnO Surface Acoustic Wave Devices on Various Substrates

Microfluidic pumps employing surface acoustic waves generated in ZnO thin films

A Surface Acoustic Wave-Based Immunosensing Device Using a Nanocrystalline ZnO Film on Si.

Design Study on SAW Devices Based on ZnO/Si Structure

Nebulization using ZnO/Si surface acoustic wave devices with focused interdigitated transducers

Crystalline Structure Effect on the Performance of Flexible ZnO/polyimide Surface Acoustic Wave Devices

Rayleigh and shear-horizontal surface acoustic waves simultaneously generated in inclined ZnO films for acoustofluidic lab-on-a-chip

Vertically Aligned Smooth ZnO Nanorod Films for Planar Device Applications

Discrete Microfluidics Based on Aluminum Nitride Surface Acoustic Wave Devices

Enhancement of Microfluidic Efficiency with Nanocrystalline Diamond Interlayer in the Zno-Based Surface Acoustic Wave Device