Abstract:A detecting method based on Fizeau interferometer for fiber-optic displacement sensing is presented to detect high-precision displacement in nanometer scale. On the basis of optical interferometry and common-path Fizeau interferometer, micro displacement can be detected by accurately measuring the distance changes between the surfaces of fiber-optic collimator and measuring mirror. Its characteristics are as follows: with common-path interferometer, dependence of energy transmitting fiber to ambient temperature is eliminated, then the effect of ambient temperature variation to the system is reduced; with the method of phase generated carrier modulation/demodulation instead of electric-control phase modulator, the optical path is formed with all-fiber components to improve the application flexibility in the system; by micro fiber-optic collimator with diameter of 1mm, the overall dimension of the displacement sensor is greatly reduced, which makes the use of the sensor more flexible. In the paper, the structure and parameters of miniature all-fiber common-path fiber-optic displacement sensor is studied, the experimental platform for high-precision displacement calibration is established, and a series of performance tests are completed. Experimental results show: with the working distance of 0-14mm, the measuring resolution of the miniature fiber-optic displacement sensor can reach 20nm, and the measuring dynamic range can get 116.9dB, which indicate that the miniature fiber-optic displacement sensor has superior performances with high resolution, high precision and large dynamic range.

Sensing Nanometric Displacement of a Micro-/Nano-fiber Induced by Optical Forces by Use of White Light Interferometry

Sensing and Exploiting Static Femto-Newton Optical Forces by a Nanofiber with White-Light Interferometry

Measuring Static Femto-Newton Optical Forces By A Nanofiber With White-Light Interferometry

Femtoliter-scale Optical Nanofiber Sensors.

Fiber-Based White-Light Interferometry for Nanoscale Distance Measurement and Control

High-Sensitivity Microfiber Strain and Force Sensors

Strongly evanescent field coupling between nanofibers for sensing transverse optical force

Hybrid optical fiber Fabry-Perot interferometer for nano-displacement sensing

An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting

Fabry–Perot Interference-Based Fiber-Optic Sensor for Small Displacement Measurement

Optical Nanofiber-Enabled Self-Detection Picobalance

Nanofiber based displacement sensor

Design and Experimental Research on Miniature Fiber-Optic Displacement Sensor

A nanonewton force sensor using a U-shape tapered microfiber interferometer

Nanofluidic Channel-Resonant Cavity Structure for Measuring Micro-Displacement of Fluorescent Substances

Optical Fiber Micro-Displacement Sensor Using a Refractive Index Modulation Window Assisted Reflection Fiber Taper

Real-time Measurement and Control of Nanofiber Diameters Using a Femtowatt Photodetector.

Demonstration of a Refractometric Sensor Based on an Optical Micro-Fiber Three-Beam Interferometer.

Nanoscale Displacement Measurement in A Variable-Air-Gap Optical Waveguide

Measuring the Sub-Pico-newton Optical Force in a Nano-Optomechanical System with the Pump-Probe Technique

An High-Finesse Nano-Displacement Sensor Based on All-Fiber Intrinsic Fabry-Perot Interferometer with Variable Cavity Length