An High-Finesse Nano-Displacement Sensor Based on All-Fiber Intrinsic Fabry-Perot Interferometer with Variable Cavity Length

吴宇,曾旭,刘晓旻,杨国光
DOI: https://doi.org/10.3321/j.issn:1005-0086.2008.09.014
2008-01-01
Abstract:A nano-displacement sensor made from all fiber intrinsic Fabry-Perot(F-P)sensor with variable cavity length is presented.A piezoelectric transducer(PZT)is used to simulate the micro-displacement.The cavity length is calculated by demodulation with frequency spectrum interpolating technology.The measured results coincide with the output by the PZT driver well,which demonstrates that the practical resolution is less than 5 nm,and the measurement range is up to 50 μm.High frequency modulation and phasic demodulation technologies are also used to improve the resolution in dynamic measurement.The system can be integrated and minimized easily by MEMS technique.
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