High-Performance Ultralow Dielectric Constant Carbon-Bridged Mesoporous Organosilica Films for Advanced Interconnects

Tao Jiang,Bao Zhu,Shi-Jin Ding,Zhongyong Fan,David Wei Zhang
DOI: https://doi.org/10.1039/c4tc00901k
IF: 6.4
2014-01-01
Journal of Materials Chemistry C
Abstract:Mesoporous organosilica (MO) films are prepared using precursor 1,2-bis(triethoxysilyl)ethane (BTEE) and porogen template poly(ethylene oxide)–poly(propylene oxide)–poly(ethylene oxide) (P123).
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