Abstract:Silicon (Si) and/or germanium (Ge) nanomembranes (NMs) play crucial roles in various applications, including conventional microelectronics, as well as recently emerging high-performance flexible/stretchable electronics. Because of their superior mechanical properties, such as flexibility, strain-ability, and bond-ability, Si/GeNMs can be strain-engineered, functionalized, and assembled into two/three-dimensional (2D/3D) micro/nano-architectures and devices. These features offer significant opportunities in nanoscience and for the development of nanotechnology. Strain engineering of semiconductor NMs enables the modification of their physical properties, in particular those of Si and Ge (e.g., carrier mobility, band structure), thus creating enormous potential for use in high-speed rigid/flexible electronics, optoelectronics, and nanophotonics. The mechanical properties of NMs allow large deformations at the micro/nano-scale, via self-assembly or guided self-assembly, leading to 3D micro/nano-architectures, including tubes, wrinkles, buckles, and mesostructures. The transformation from 2D planar NMs to 3D micro/nano-architectures again strongly influences physical properties (e.g., mechanics, optics, and electronics), providing fascinating applications in sensing, energy harvesting, bio-integration, and flexible/stretchable electronics. In this Review, the recent progress in strain engineering and mechanical assembly of Si/GeNMs is reviewed, ranging from fundamental principles to device applications.

Three Dimensional Strain Distribution of Wrinkled Silicon Nanomembranes Fabricated by Rolling-Transfer Technique

Spatially Configuring Wrinkle Pattern and Multiscale Surface Evolution with Structural Confinement

Biaxially Stretchable "wavy" Silicon Nanomembranes.

Wrinkling of Silicon Nanoribbons on Shape Memory Polymers

Experimental realization of coexisting states of rolled-up and wrinkled nanomembranes by strain and etching control

Elastically Relaxed Free-standing Strained-Si Nanomembranes

Measurement of residual elastic strain in rolled-up amorphous nanomembranes using nanobeam electron diffraction

Directional Roll-up of Nanomembranes Mediated by Wrinkling

Manipulation of Strain State in Silicon Nanoribbons by Top-Down Approach

Wrinkles Formation and Evolution of Nanoribbons with Finite Length on Elastomeric Substrate

A Novel Low-Temperature Post-Curing Transfer Method Of Graphene Wrinkling Surface For Strain Engineering

Tunable Spatially Dependent Wrinkling Morphologies on Pre-Curved Surfaces

Strain Engineering and Mechanical Assembly of Silicon/germanium Nanomembranes

Harnessing Heterogeneous Wrinkles in Metal/Polydimethylsiloxane Film System by Combination of Mechanical Loading and Heat Treatment

Spontaneous Wrinkling Pattern of A Constrained Thin Film Membrane

Mechanical Self-Assembly of a Strain-Engineered Flexible Layer: Wrinkling, Rolling, and Twisting

Harnessing multimodal wrinkle patterns in flexible films by three-axial mechanical loading

Mechanism of Three-Dimensional Surface Wrinkle Manipulation on a Compliant Substrate

Multifunctional Nanocracks in Silicon Nanomembranes by Notch-Assisted Transfer Printing

Controllable formation of periodic wrinkles in Marangoni-driven self-assembled graphene film for sensitive strain detection

Mechanics of micropattern-guided formation of elastic surface instabilities on the polydimethylsiloxane bilayer