Abstract:We present a new, robust three dimensional microfabrication method for highly parallel microfluidics, to improve the throughput of on-chip material synthesis by allowing parallel and simultaneous operation of many replicate devices on a single chip. Recently, parallelized microfluidic chips fabricated in Silicon and glass have been developed to increase the throughput of microfluidic materials synthesis to an industrially relevant scale. These parallelized microfluidic chips require large arrays (>10,000) of Through Silicon Vias (TSVs) to deliver fluid from delivery channels to the parallelized devices. Ideally, these TSVs should have a small footprint to allow a high density of features to be packed into a single chip, have channels on both sides of the wafer, and at the same time minimize debris generation and wafer warping to enable permanent bonding of the device to glass. Because of these requirements and challenges, previous approaches cannot be easily applied to produce three dimensional microfluidic chips with a large array of TSVs. To address these issues, in this paper we report a fabrication strategy for the robust fabrication of three-dimensional Silicon microfluidic chips consisting of a dense array of TSVs, designed specifically for highly parallelized microfluidics. In particular, we have developed a two-layer TSV design that allows small diameter vias (d < 20 µm) without sacrificing the mechanical stability of the chip and a patterned SiO2 etch-stop layer to replace the use of carrier wafers in Deep Reactive Ion Etching (DRIE). Our microfabrication strategy allows >50,000 (d = 15 µm) TSVs to be fabricated on a single 4" wafer, using only conventional semiconductor fabrication equipment, with 100% yield (M = 16 chips) compared to 30% using previous approaches. We demonstrated the utility of these fabrication strategies by developing a chip that incorporates 20,160 flow focusing droplet generators onto a single 4" Silicon wafer, representing a 100% increase in the total number of droplet generators than previously reported. To demonstrate the utility of this chip for generating pharmaceutical microparticle formulations, we generated 5-9 µm polycaprolactone particles with a CV < 5% at a rate as high as 60 g/hr (>1 trillion particles/hour).

Process Integration of Microtubes for Fluidic Applications

Integration of three-dimensional printing and microfluidics

Soft tubular microfluidics for 2D and 3D applications

Controllable Preparation of Microscale Tubes with Multiphase Co-Laminar Flow in a Double Co-Axial Microdevice

Flexible liquid-diode microtubes from multimodal microfluidics

Micro Etching Method Inside Microchannels

Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

Robust Microfabrication of Highly Parallelized Three-Dimensional Microfluidics on Silicon

A novel MEMS compatible lab-on-a-tube technology.

One Step Synthesis of Three-Dimensional Microtubes with Single Exposure of Structured Femtosecond Optical Vortices

Composable microfluidic spinning platforms for facile production of biomimetic perfusable hydrogel microtubes

Gas-Solution Interface Technique As a Simple Method to Produce Inorganic Microtubes with Scroll Morphology

Microdroplet Operations in Polymeric Microtubes

3D Nanofabrication inside rapid prototyped microfluidic channels showcased by wet-spinning of single micrometre fibres

Twisted fiber microfluidics: a cutting-edge approach to 3D spiral devices

Planar microfluidics - liquid handling without walls

Openable Double‐Microtube Structure Driven by Pneumatic Balloon Actuator Arrays for Tubular Organ‐on‐a‐Chip

Versatile Approach for Integrative and Functionalized Tubes by Strain Engineering of Nanomembranes on Polymers

An Alternative Micro-Milling Fabrication Process for Rapid and Low-Cost Microfluidics

A microfluidic tubing method and its application for controlled synthesis of polymeric nanoparticles

Fabrication of Embedded Microfluidic Chips with Single Micron Resolution Using Two‐Photon Lithography