Ag-Assisted Lateral Etching of Si Nanowires and Its Application to Nanowire Transfer

Chuanbo Li,Kristel Fobelets,Chang Liu,Chunlai Xue,Buwen Cheng,Qiming Wang
DOI: https://doi.org/10.1063/1.4826930
IF: 4
2013-01-01
Applied Physics Letters
Abstract:Ag-assisted anisotropic lateral etching along the ⟨100⟩ directions in Si nanowire arrays (Si NWAs) is investigated. It is found that Ag ions, generated by H2O2 oxidation of Ag particles, re-nucleate on the sidewalls of the nanowires, causing side etching and tapering of the wires. By enhancing the side etching effect, fractures can be formed at specific positions along the nanowires. This technique is applied to transfer large-area Si NWAs onto a glass substrate.
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