Epitaxial Growth of 6 In. Single‐Crystalline Graphene on a Cu/Ni (111) Film at 750 °C Via Chemical Vapor Deposition
Xuefu Zhang,Tianru Wu,Qi Jiang,Huishan Wang,Hailong Zhu,Zhiying Chen,Ren Jiang,Tianchao Niu,Zhuojun Li,Youwei Zhang,Zhijun Qiu,Guanghui Yu,Ang Li,Shan Qiao,Haomin Wang,Qingkai Yu,Xiaoming Xie
DOI: https://doi.org/10.1002/smll.201805395
IF: 13.3
2019-01-01
Small
Abstract:The future electronic application of graphene highly relies on the production of large-area high-quality single-crystal graphene. However, the growth of single-crystal graphene on different substrates via either single nucleation or seamless stitching is carried out at a temperature of 1000 degrees C or higher. The usage of this high temperature generates a variety of problems, including complexity of operation, higher contamination, metal evaporation, and wrinkles owing to the mismatch of thermal expansion coefficients between the substrate and graphene. Here, a new approach for the fabrication of ultraflat single-crystal graphene using Cu/Ni (111)/sapphire wafers at lower temperature is reported. It is found that the temperature of epitaxial growth of graphene using Cu/Ni (111) can be reduced to 750 degrees C, much lower than that of earlier reports on catalytic surfaces. Devices made of graphene grown at 750 degrees C have a carrier mobility up to approximate to 9700 cm(2) V-1 s(-1) at room temperature. This work shines light on a way toward a much lower temperature growth of high-quality graphene in single crystallinity, which could benefit future electronic applications.