Abstract:In this paper, a line-scanning irradiation of <0001> 6H-SiC single crystal by a femtosecond laser focus was implemented for laser fluence of 2.2 J/cm 2 at different scanning velocities from 1000 down to 100 μm/s. The morphology of the obtained ablation lines characterized by a scanning electron microscope shows that there progressively appear three-level ripples with average period of about 222, 600 nm and that between them. Possible formation mechanisms for these three-level ripples were analyzed by numerical simulation employing finite-difference time-domain method (FDTD). Analysis shows that as Obara proposed, the interference of incident wave with the wave scattered by scratches possibly left by fine polishing is the most possible reason for inducing 222 nm-period and 600 nm-period ripples. Main discussions were focused on the orientation characteristics of ripples. Both isolated scratches and crossed scratches with different orientation angles were considered for evaluating their role in field redistribution. The detailed simulations indicate that for scratches oriented 90° with respect to laser polarization generate a pair of strongest ripple-like optical field enhancement compared to scratches with other orientation angles. It is these advantages of 90°-oriented scratch in field enhancement that make the final ripple perpendicular to laser polarization most competitive and finally left on the surface. This complements the physical picture of Obara et al. in terms of their negligence in addressing the orientation characteristics of ripples. Further FDTD simulation of the interaction of incident wave with as-formed 600 nm-period ripples shows that the optical field enhancement located between any two adjacent 600 nm-period ripples is the driving force for splitting 600 nm-period ripples into the third ripples with period between 222 and 600 nm.

Fabrication of Large-Scale Ripples on Fluorine-Doped Tin Oxide Films by Femtosecond Laser Irradiation

The Three-Level Ripples Induced by Femtosecond Laser on a 6H-Sic Single Crystal and the Formation Mechanism

Formation and Evolution of Micro/Nano Periodic Ripples on 2205 Stainless Steel Machined by Femtosecond Laser

Evolution of nano-ripples on stainless steel irradiated by picosecond laser pulses

Ripple Formation in Excimer Laser-Irradiated Silicon Dioxide/silicon System

Formation of Long- and Short-Periodic Nanoripples on Stainless Steel Irradiated by Femtosecond Laser Pulses

Periodic Ripple Structures on Silicon Substrates Induced by Femtosecond Laser at Various Scan Modes

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Mechanism for Formation of Rippling Structure on Surface of Metallic Glasses Irradiated by Pulse Nanosecond Laser

High-Performance Birefringence of Periodic Nanostructures in FTO Thin Film Fabricated by IR-UV Femtosecond Laser

Coherent Atomic-Scale Ripples on Metallic Glasses Patterned by Low-Energy Ion Irradiation for Large-Area Surface Structuring

Femtosecond Laser Induced Ripples And Nanohole Arrays On Silicon

Micro-Nano Scale Ripples On Metallic Glass Induced By Laser Pulse

One-step Nanofabrication of Diffractive Structure via Focused Ion Beam Scanning on Glass

Ultrafast Thermal Modulation Dynamics During Ripples Formation Induced by Femtosecond Laser Multi-Pulse Vortex Beam

Fabrication of large‐area linear and nonlinear surface ripple structures on polystyrene films

Ultrafast Thermal Dynamics of Nano-Ripples Formation Via Laser Double Pulses Excitation

Large-area commercial-grating-quality subwavelength periodic ripples on silicon efficiently fabricated by gentle ablation with femtosecond laser interference via two cylindrical lenses

Coalescence and dislocation of laser induced periodic ripples on silicon by double time delayed femtosecond laser beams

Laser-induced surface structures at polymer surfaces irradiated by ns-UV-laser in water confinement and in air

Polarization Dependent Ripples Induced by Femtosecond Laser on Dense Flint (zf(6)) Glass