Abstract:Ion irradiation and femtosecond laser ablation (FLA) are powerful technologies for micro-/nano-machining of transparent materials. In this work, we demonstrate selective surface engineering of optical crystal surface via ion irradiation and subsequent FLA, namely ion-irradiation-assisted FLA. Based on the material modification effects in the ion-irradiated layers, different types of surface structuring characterized by grooves, nanogratings or sub-micron tracks are selectively induced by FLA. It is revealed that the ion-electron interaction induced localized lattice defects and related property modulation in target crystal play important roles in the formation and evolution of laser ablation regimes. Furthermore, the formation process of high-spatial-frequency nanograting is illustrated with the periodical enhancement of local field through the excitation of surface plasmon polaritons, which is experimentally supported through the measurements of transmission electron microscope and energy-dispersive spectroscopy. Our findings further clarify the ion- and laser-matter interactions and the correlation between these processes and surface modifications. The approach proposed in this work shows potential applications in the rapid fabrication of hybrid and versatile surface structures on crystalline materials.

One-step Nanofabrication of Diffractive Structure via Focused Ion Beam Scanning on Glass

Self-organized Formation of a Blazed-grating-like Structure on Si(100) Induced by Focused Ion-Beam Scanning

Quasi-Direct Writing Of Diffractive Structures With A Focused Ion Beam

Formation of Si Nanocrystals in Glass by Femtosecond Laser Micromachining

Inscribing Diffraction Grating by Femtosecond Laser Ablation of Metal Film on Glass Substrate

Three-dimensional Nanostructuring of Transparent Materials by the Femtosecond Laser Irradiation

Nanoscale investigations of femtosecond laser induced nanogratings in optical glasses

Nanofabrication in transparent materials with a femtosecond pulse laser

Single-step maskless nano-lithography on glass by femtosecond laser processing

Fabrication of beam shapers in the bulk of fused silica by femtosecond laser pulses.

Fabrication Of Nano-Grating Inside Transparent Materials By Using A Single Femtosecond Laser Beam

Optical Improvement of Photonic Devices Fabricated by Ga+ Focused Ion Beam Micromachining

Fabrication of Internal Diffraction Gratings in Calcium Fluoride Crystals by a Focused Femtosecond Laser

Tailored engineering of crystalline surface enabled by ion-irradiation-assisted femtosecond laser ablation

Direct Femtosecond Laser Nanopatterning of Glass Substrate by Particle-Assisted Near-Field Enhancement

Investigation of Diffractive-Refractive Microlens Array Fabricated by Focused Ion Beam Technology

Nanostructuring Optical Waveguides by Focused Ion Beam Milling. Near-Field Characterization

Microfabrication Of Diffractive Optical Element With Continuous Relief By Focused Ion Beam

One-step Transfer of Diffractive Structure from a Designed Pattern to a Replica by Use of a Hybrid Solgel Film.

Reactive Ion Beam Etching of Large-Aperture Multilayer Diffraction Gratings by Radio Frequency Ion Beam Source

Fabrication of micro-optical components by using a femtosecond laser