Steady-state Temperature Profiles in Thermally Thin Substrates Induced by Arbitrarily Shaped Laser Beams

K IMEN,JY LIN,SD ALLEN
DOI: https://doi.org/10.1063/1.343563
IF: 2.877
1989-01-01
Journal of Applied Physics
Abstract:The steady-state temperature profiles in flat, thermally thin slabs in a low thermal conductivity medium such as air or gas are calculated. For sufficiently thin samples, conduction to the ambient dominates. Solutions applicable to laser processing of technologically interesting samples such as thin semiconductor wafers heated with Gaussian beams are derived. Included are simple expresssions that allow estimation of the front and back surface temperatures and deviation from the assumption of semi-infinity in both depth and radius.
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