Localizing surface plasmons with a metal-cladding superlens for projecting deep-subwavelength patterns
T. Xu,L. Fang,J. Ma,B. Zeng,Y. Liu,J. Cui,C. Wang,Q. Feng,X. Luo
DOI: https://doi.org/10.1007/s00340-009-3615-8
2009-01-01
Applied Physics B
Abstract:Superlens, which is proposed to realize sub-diffraction-limited optical imaging, has been experimentally verified (N. Fang et al., Science 308, 534 ( 2005 ), D. Melville and R.J. Blaikie, Opt. Express 13, 2127 ( 2005 )). Based on the basic experimental configuration, here we propose a metal-cladding structure developed to effectively localize the surface plasmons for projecting deep-subwavelength patterns. We give a numerical analysis on the structure and show that proper choices of incident wavelength can realize either deep-subwavelength interference patterning or high-quality optical imaging. The study presented here is believed to provide an approach for developing high-resolution optical lithography.