Investigation on Super-Resolution Near-Field Blu-Ray-Type Phase-Change Optical Disk with Sb<sub>2</sub>Te<sub>3</sub> Mask Layer

Luping Shi,Tong Chong Chong,Pik Kee Tan,Jianming Li,Xiang Hu,Xiangshui Miao,Qingfang Wang
DOI: https://doi.org/10.1143/JJAP.44.3615
2005-01-01
Abstract:Super-resolution near-field phase-change Blu-ray-type optical disks with a mask layer of Sb2Te3 were studied theoretically and experimentally with a laser wavelength of 405 nm and a numerical aperture (NA) of 0.85. The modulation transfer function (MTF) was calculated and the thermal performance was simulated by the finite element method. Super-resolution near-field phase-change Blu-ray-type optical disks with different structures were fabricated and measured. It was shown that the thermal shield layer was helpful in reducing recorded mark size and improving readout stability. Recorded marks as small as 16 nm were observed. The relevant mechanism was discussed.
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