Abstract:A general method is presented for spherical surface testing with unknown phase shifts based on a physical model of the interferometer cavity, which describes the phase shifts taking into account the rigid cavity motions and the radial imaging distortion of the interferometer. The captured interferograms are processed frame by frame with the regularized frequency-stabilizing method, so as to get the phase shifts between the frames. These phase shift data are subsequently fitted, and the initial estimations for the wavefront, direct current and interference contrast terms are calculated by the least-squares method. Specially, a simple way is proposed to find reasonable initial guess for numerical aperture (NA) of the test beam (when NA is unknown), so as to ensure the effectiveness of the above phase shift fitting procedure. Then, the wavefront result is further refined in an iterative way, by fitting the sequence of interferograms to the physical model of the interferometer cavity with the linear regression technique. Finally, the wavefront result related to the actual surface profile is retrieved after removing the aberrations due to the surface misalignment and the imaging distortion. Both simulations and experiments with the ZYGO interferometer have been carried out to validate the proposed method, with experimental accuracies better than 0.004λ RMS achieved. The proposed method provides a feasible way to spherical surface testing without the use of any phase-shifting devices, while retaining good accuracy and robust convergence performance.

Absolute Ultra-Precision Measurement of High-Numerical-aperture Spherical Surface by High-Order Shift-Rotation Method Using Zernike Polynomials

Error Analysis Of Spherical Ultra-Precision Measurement

Aberration Calibration in High-Na Spherical Surfaces Measurement on Point Diffraction Interferometry

Generalized Shift-Rotation Absolute Measurement Method for High-Numerical-Aperture Spherical Surfaces with Global Optimized Wavefront Reconstruction Algorithm

Error impact analysis and experimental research for absolute testing of spherical surfaces

Elimination of reference surface error on high-accuracy subaperture stitching

Sub-Nanometer Misalignment Aberrations Calibration of the Fizeau Interferometer for High-Numerical-Aperture Spherical Surface Ultra-Precision Measurement

Practical and Accurate Method for Aspheric Misalignment Aberrations Calibration in Non-Null Interferometric Testing

Misalignment Correction for Free-Form Surface in Non-Null Interferometric Testing

Calibration of Polarization and Adjustment Error of High-Na Spherical Surface Testing in Point Diffraction Interferometry

Calibration of Phase-Step Nonuniformity in Sub-Nanometer-accuracy Testing of High-Numerical-aperture Spherical Surfaces

Absolute Spherical Surface Metrology by Differencing Rotation Maps.

Simulation and Experimental Study of Absolute Measurement Method for Optical Surface

Absolute Surface Metrology by Shear Rotation with Position Error Correction

Method for Absolute Measurement of Flat Surface

Measurement of steep aspheric surfaces using improved two-wavelength phase-shifting interferometer

Interferometric Spherical Surface Testing with Unknown Phase Shifts

Realization Of Spherical Absolute Testing

Air Flow Turbulence Orthogonality and Surface Error Estimation in Large Aperture Optical Testing

Testing big curvature surface of optical element with zernike polynomial fitting twice

Full-aperture surface reconstruction method for shift-rotation absolute measurement with tilt error suppression