Solar-Blind Photodetectors Based on Polycrystalline Mgzno Thin Films

Gaoming Li,Jingwen Zhang,Ying Liu,Kunfeng Zhang
DOI: https://doi.org/10.1117/1.3643722
IF: 1.3
2011-01-01
Optical Engineering
Abstract:Photoconductive metal-semiconductor-metal ultraviolet detectors were fabricated based on the polycrystalline MgZnO films, which were grown on SiO(2)/Si substrates by radio frequency magnetron sputtering. The peak response of the detector was at 300 nm, which lay in the solar-blind spectrum range (220 to 300 nm). And the peak responsivity was 34.02 A/W. The ratio of I(ph)/I(d) was as high as 2659.7 at 5 V bias under a low pressure Hg lamp illumination. And a rise time of 44.48 mu s (90%) and fall time of 120.2 ms (10%) of the detector were acquired. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3643722]
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