Threshold Voltage Dependence On Channel Width In Nano-Channel Array Algan/Gan Hemts

shenghou liu,yong cai,rumin gong,jinyan wang,chunhong zeng,wenhua shi,zhihong feng,jiayun yin,cheng p wen,hua qin,baoshun zhang
DOI: https://doi.org/10.1002/pssc.201100415
2012-01-01
Abstract:In this paper, we demonstrate a nano-channel array (NCA) structure to realize the control of threshold voltage (V-th) of AlGaN/GaN HEMTs. The fabricated NCA structure consists of multiple nano-channels parallelly connected together. Using this structure, the V-th of AlGaN/GaN HEMTs can be systematically shifted from -3.92 V for a conventional depletion-mode (D-mode) AlGaN/GaN HEMT to 0.15 V for an enhancement-mode (E-mode) AlGaN/GaN HEMT. Besides, an optimum maximum peak transconductance of 235 mS/mm was achieved at the nano-channel width of 224 nm, which is almost two times larger than that of C-HEMT. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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